Patent Assignment Details
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| Reel/Frame: | 026862/0512 | |
| Pages: | 3 |
| | Recorded: | 09/07/2011 | | |
| Attorney Dkt #: | P3627 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/31/2015
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Application #:
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13226492
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Filing Dt:
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09/06/2011
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Publication #:
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Pub Dt:
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03/07/2013
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Title:
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PASSIVE POSITION COMPENSATION OF A SPINDLE, STAGE, OR COMPONENT EXPOSED TO A HEAT LOAD
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Assignee
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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DEBORAH WENOCUR/KLA TENCOR
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4057 AMARANTA AVENUE
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PALO ALTO, CA 94306
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