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Reel/Frame:019121/0513   Pages: 4
Recorded: 04/05/2007
Attorney Dkt #:1857.4480000/TAW
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/21/2011
Application #:
11708131
Filing Dt:
02/20/2007
Publication #:
Pub Dt:
08/21/2008
Title:
OPTICAL SYSTEM AND METHOD FOR ILLUIMINATION OF REFLECTIVE SPATIAL LIGHT MODULATORS IN MASKLESS LITHOGRAPHY
Assignors
1
Exec Dt:
03/22/2007
2
Exec Dt:
03/23/2007
Assignee
1
DE RUN 6501
NL - 5504 DR
VELDHOVEN, NETHERLANDS
Correspondence name and address
STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
1100 NEW YORK AVENUE, N.W.
WASHINGTON, DC 20005

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