Patent Assignment Details
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Reel/Frame: | 019712/0516 | |
| Pages: | 4 |
| | Recorded: | 08/17/2007 | | |
Attorney Dkt #: | 1610US/NAT |
Conveyance: | CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/25/2007
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Application #:
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11293336
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Filing Dt:
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12/01/2005
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Publication #:
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Pub Dt:
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03/01/2007
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Title:
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INDUCTIVELY COUPLED PLASMA ALIGNMENT APPARATUS AND METHOD
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Assignee
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81 WYMAN STREET |
WALTHAM, MASSACHUSETTS 02454 |
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Correspondence name and address
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DIANE KIZER
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355 RIVER OAKS PARKWAY
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SAN JOSE, CA 95134
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