Patent Assignment Details
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| Reel/Frame: | 018417/0517 | |
| Pages: | 5 |
| | Recorded: | 10/16/2006 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/06/2010
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Application #:
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11493848
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Filing Dt:
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07/27/2006
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Publication #:
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Pub Dt:
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02/01/2007
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Title:
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METHOD FOR FILTERING PARTICLES OUT OF A BEAM OF RADIATION AND FILTER FOR A LITHOGRAPHIC APPARATUS
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Assignee
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| DE RUN 6501 |
| NL-5504 DR, VELDHOVEN, NETHERLANDS |
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Correspondence name and address
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PILLSBURY WINTHROP SHAW PITTMAN LLP
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P.O. BOX 10500
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1650 TYSONS BOULEVARD
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MCLEAN, VA 22102
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