Patent Assignment Details
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Reel/Frame: | 022105/0518 | |
| Pages: | 3 |
| | Recorded: | 01/09/2009 | | |
Attorney Dkt #: | 033082 M 587 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12285885
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Filing Dt:
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10/15/2008
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Publication #:
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Pub Dt:
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05/14/2009
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Title:
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Vertical plasma processing apparatus and method for using same
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Assignee
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3-1, AKASAKA 5-CHOME, |
MINATO-KU, TOKYO, 107-6325, JAPAN |
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Correspondence name and address
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MICHAEL A. MAKUCH
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SMITH, GAMBRELL & RUSSELL, LLP
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1130 CONNECTICUT AVENUE - SUITE 1130
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WASHINGTON, DC 20036
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