Patent Assignment Details
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Reel/Frame: | 022341/0518 | |
| Pages: | 4 |
| | Recorded: | 02/23/2009 | | |
Attorney Dkt #: | 139679.01 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/02/2018
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Application #:
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12379471
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Filing Dt:
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02/23/2009
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Publication #:
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Pub Dt:
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07/02/2009
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Title:
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Method for manufacturing semiconductor device and substrate processing apparatus
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Assignee
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14-1, SOTOAKANDA 4-CHOME |
CHIYODA-KU, TOKYO, JAPAN 101-8980 |
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Correspondence name and address
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JAMES A. OLIFF
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OLIFF & BERRIDGE, PLC
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P.O. BOX 320850
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ALEXANDRIA, VA 22320-4850
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