Patent Assignment Details
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| Reel/Frame: | 066239/0518 | |
| Pages: | 5 |
| | Recorded: | 01/25/2024 | | |
| Attorney Dkt #: | 2918.0137C |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18541693
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Filing Dt:
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12/15/2023
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Publication #:
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Pub Dt:
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04/04/2024
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Title:
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PROCESS FOR DEPOSITION OF AN OUTER LAYER, REFLECTIVE OPTICAL ELEMENT FOR THE EUV WAVELENGTH RANGE AND EUV LITHOGRAPHY SYSTEM
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Assignee
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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EDELL, SHAPIRO & FINNAN, LLC
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GEORGE F. LEHNIGK
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9801 WASHINGTONIAN BLVD., SUITE 750
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GAITHERSBURG, MD 20878
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09/22/2024 07:23 PM
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