Patent Assignment Details
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Reel/Frame: | 011321/0519 | |
| Pages: | 4 |
| | Recorded: | 11/22/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/08/2003
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Application #:
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09653824
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Filing Dt:
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09/01/2000
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Title:
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METHODS AND DEVICES FOR DETERMINING TIMES FOR MAINTENANCE ACTIVITY PERFORMED ON A CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY APPARATUS, AND MICROELECTRONIC-DEVICE-MANUFACTURING METHODS COMPRISING SAME
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Assignee
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MARUNOUCHI 3-CHOME, CHIYODA-KU |
FUJI BUILDING, 2-3 |
TOKYO, 100, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN CAMPBELL ET AL.
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DONALD L. STEPHENS JR.
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121 S.W. SALMON STREET
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PORTLAND, OR 97204-2988
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