Patent Assignment Details
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Reel/Frame: | 054645/0519 | |
| Pages: | 7 |
| | Recorded: | 12/15/2020 | | |
Attorney Dkt #: | 30062-0100001 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/03/2023
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Application #:
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17087970
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Filing Dt:
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11/03/2020
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Publication #:
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Pub Dt:
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03/11/2021
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Title:
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METHOD AND APPARATUS FOR EVALUATING AN UNKNOWN EFFECT OF DEFECTS OF AN ELEMENT OF A PHOTOLITHOGRAPHY PROCESS
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Assignee
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RUDOLF-EBER-STRASSE 2 |
OBERKOCHEN, GERMANY 73447 |
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Correspondence name and address
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REX I. HUANG
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FISH & RICHARDSON P.C.
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P.O.BOX 1022
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MINNEAPOLIS, MN 55440-1022
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09/26/2024 03:17 PM
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