Patent Assignment Details
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| Reel/Frame: | 012867/0522 | |
| Pages: | 3 |
| | Recorded: | 05/02/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/03/2002
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Application #:
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10138143
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Filing Dt:
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05/02/2002
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Publication #:
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Pub Dt:
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09/19/2002
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Title:
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SYSTEM AND METHOD FOR PERFORMING SPUTTER DEPOSITION USING A DIVERGENT ION BEAM SOURCE AND A ROTATING SUBSTRATE
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Assignee
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| 500 PENDLETON STRRET |
| ALEXANDRIA, VIRGINIA 22314 |
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Correspondence name and address
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DANIEL H. GOLUB
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1701 MARKET ST.
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PHILA., PA 19103
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