Patent Assignment Details
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| Reel/Frame: | 014799/0522 | |
| Pages: | 3 |
| | Recorded: | 12/17/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/14/2006
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Application #:
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10638328
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Filing Dt:
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08/12/2003
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Publication #:
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Pub Dt:
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05/06/2004
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Title:
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BEAM GUIDING ARRANGEMENT, IMAGING METHOD, ELECTRON MICROSCOPY SYSTEM AND ELECTRON LITHOGRAPHY SYSTEM
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Assignee
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| CARL-ZEISS-STRASSE 56 |
| D-73447, OBERKOCHEN, GERMANY |
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Correspondence name and address
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BURNS, DOANE, SWECKER ET AL.
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JAMES W. PETERSON
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P.O. BOX 1404
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ALEXANDRIA, VA 22313-1450
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