Patent Assignment Details
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Reel/Frame: | 020005/0523 | |
| Pages: | 7 |
| | Recorded: | 10/24/2007 | | |
Attorney Dkt #: | 2005-055 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/09/2008
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Application #:
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11241406
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Filing Dt:
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09/30/2005
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Publication #:
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Pub Dt:
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04/19/2007
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Title:
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METHOD, SYSTEM, AND APPARATUS FOR IMPROVING DOPING UNIFORMITY IN HIGH-TILT ION IMPLANTATION
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Assignee
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35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
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Correspondence name and address
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SCOTT RICHARD FABER, ESQ.
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35 DORY ROAD
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VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE
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GLOUCESTER, MA 01930
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