Patent Assignment Details
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Reel/Frame: | 055271/0524 | |
| Pages: | 26 |
| | Recorded: | 02/10/2021 | | |
Attorney Dkt #: | HITACHI13-0002432US01 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/12/2023
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Application #:
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17139262
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Filing Dt:
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12/31/2020
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Publication #:
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Pub Dt:
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04/29/2021
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Title:
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METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignee
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3-4, KANDAKAJI-CHO, CHIYODA-KU |
TOKYO, JAPAN 101-0045 |
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Correspondence name and address
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VOLPE KOENIG
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30 SOUTH 17TH STREET, 18TH FLOOR
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PHILADELPHIA, PA 19103
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09/23/2024 01:18 AM
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