Patent Assignment Details
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| Reel/Frame: | 010734/0529 | |
| Pages: | 3 |
| | Recorded: | 04/18/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/09/2002
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Application #:
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09551531
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Filing Dt:
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04/18/2000
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Title:
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PHOTORESIST OUTGASSING MILTGATION SYSTEM METHOD AND APPARATUS FOR IN-VACUUM LITHOGRAPHY
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Assignee
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| 101 METRO DRIVE, SUITE 40 |
| SAN JOSE, CALIFORNIA 95110 |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN ET AL
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MICHAEL V MESSINGER
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1100 NEW YORK AVE., N.W
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SUITE 600
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WASHINGTON, D.C. 20005-3934
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