Total properties:
23
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Patent #:
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Issue Dt:
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06/22/2010
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Application #:
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12210012
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Filing Dt:
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09/12/2008
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Publication #:
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Pub Dt:
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03/18/2010
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Title:
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SPECTRAL PURITY FILTERS AND METHODS THEREFOR
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Patent #:
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Issue Dt:
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06/12/2012
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Application #:
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12221313
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Filing Dt:
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07/31/2008
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Publication #:
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Pub Dt:
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02/04/2010
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Title:
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SYSTEMS AND METHODS FOR HEATING AN EUV COLLECTOR MIRROR
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Patent #:
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Issue Dt:
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07/13/2010
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Application #:
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12255347
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Filing Dt:
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10/21/2008
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Publication #:
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Pub Dt:
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04/22/2010
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Title:
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METHOD AND APPARATUS FOR LASER CONTROL IN A TWO CHAMBER GAS DISCHARGE LASER
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Patent #:
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Issue Dt:
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05/18/2010
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Application #:
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12255367
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Filing Dt:
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10/21/2008
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Publication #:
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Pub Dt:
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04/22/2010
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Title:
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METHOD AND APPARATUS FOR LASER CONTROL IN A TWO CHAMBER GAS DISCHARGE LASER
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Patent #:
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Issue Dt:
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07/06/2010
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Application #:
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12255385
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Filing Dt:
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10/21/2008
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Publication #:
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Pub Dt:
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04/22/2010
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Title:
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METHOD AND APPARATUS FOR LASER CONTROL IN A TWO CHAMBER GAS DISCHARGE LASER
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Patent #:
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Issue Dt:
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10/26/2010
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Application #:
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12261737
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Filing Dt:
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10/30/2008
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Publication #:
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Pub Dt:
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05/06/2010
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Title:
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METAL FLUORIDE TRAP
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Patent #:
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Issue Dt:
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04/28/2015
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Application #:
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12284031
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Filing Dt:
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09/17/2008
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Publication #:
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Pub Dt:
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05/07/2009
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Title:
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HIGH POWER SEED/AMPLIFIER LASER SYSTEM WITH BEAM SHAPING INTERMEDIATE THE SEED AND AMPLIFIER
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Patent #:
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Issue Dt:
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01/05/2010
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Application #:
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12284585
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Filing Dt:
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09/22/2008
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Title:
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SYSTEMS AND METHODS FOR COLLECTOR MIRROR TEMPERATURE CONTROL USING DIRECT CONTACT HEAT TRANSFER
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Patent #:
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Issue Dt:
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03/03/2015
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Application #:
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12460762
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Filing Dt:
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07/23/2009
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Publication #:
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Pub Dt:
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10/14/2010
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Title:
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SYSTEMS AND METHODS FOR PROTECTING AN EUV LIGHT SOURCE CHAMBER FROM HIGH PRESSURE SOURCE MATERIAL LEAKS
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Patent #:
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Issue Dt:
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10/09/2012
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Application #:
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12592107
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Filing Dt:
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11/18/2009
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Publication #:
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Pub Dt:
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05/27/2010
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Title:
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SYSTEMS AND METHODS FOR DRIVE LASER BEAM DELIVERY IN AN EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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08/09/2011
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Application #:
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12603486
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Filing Dt:
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10/21/2009
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Publication #:
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Pub Dt:
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06/10/2010
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Title:
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GAS DISCHARGE LASER CHAMBER
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Patent #:
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Issue Dt:
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03/27/2012
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Application #:
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12605306
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Filing Dt:
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10/23/2009
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Publication #:
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Pub Dt:
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06/17/2010
| | | | |
Title:
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SYSTEM METHOD AND APPARATUS FOR SELECTING AND CONTROLLING LIGHT SOURCE BANDWIDTH
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Patent #:
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Issue Dt:
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08/28/2012
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Application #:
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12620967
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Filing Dt:
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11/18/2009
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Publication #:
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Pub Dt:
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05/19/2011
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Title:
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ADVANCED LASER WAVELENGTH CONTROL
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Patent #:
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Issue Dt:
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08/16/2011
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Application #:
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12637961
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Filing Dt:
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12/15/2009
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Publication #:
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Pub Dt:
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06/16/2011
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Title:
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METROLOGY FOR EXTREME ULTRAVIOLET LIGHT SOURCE
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Patent #:
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Issue Dt:
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11/06/2012
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Application #:
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12638413
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Filing Dt:
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12/15/2009
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Publication #:
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Pub Dt:
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12/30/2010
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Title:
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EUV LIGHT PRODUCING SYSTEM AND METHOD UTILIZING AN ALIGNMENT LASER
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Patent #:
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Issue Dt:
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03/20/2012
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Application #:
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12720190
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Filing Dt:
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03/09/2010
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Publication #:
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Pub Dt:
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10/14/2010
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Title:
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SYSTEM, METHOD AND APPARATUS FOR DROPLET CATCHER FOR PREVENTION OF BACKSPLASH IN A EUV GENERATION CHAMBER
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Patent #:
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Issue Dt:
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04/17/2012
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Application #:
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12721317
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Filing Dt:
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03/10/2010
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Publication #:
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Pub Dt:
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11/25/2010
| | | | |
Title:
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LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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09/06/2011
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Application #:
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12724681
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Filing Dt:
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03/16/2010
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Publication #:
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Pub Dt:
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03/24/2011
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Title:
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REGENERATIVE RING RESONATOR
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Patent #:
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Issue Dt:
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11/05/2013
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Application #:
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12725167
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Filing Dt:
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03/16/2010
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Publication #:
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Pub Dt:
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10/14/2010
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Title:
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SYSTEM, METHOD AND APPARATUS FOR LASER PRODUCED PLASMA EXTREME ULTRAVIOLET CHAMBER WITH HOT WALLS AND COLD COLLECTOR MIRROR
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Patent #:
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Issue Dt:
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02/18/2014
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Application #:
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12725178
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Filing Dt:
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03/16/2010
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Publication #:
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Pub Dt:
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10/14/2010
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Title:
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SYSTEM, METHOD AND APPARATUS FOR ALIGNING AND SYNCHRONIZING TARGET MATERIAL FOR OPTIMUM EXTREME ULTRAVIOLET LIGHT OUTPUT
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Patent #:
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Issue Dt:
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10/23/2012
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Application #:
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12730506
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Filing Dt:
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03/24/2010
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Publication #:
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Pub Dt:
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09/29/2011
| | | | |
Title:
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METHOD AND SYSTEM FOR MANAGING LIGHT SOURCE OPERATION
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Patent #:
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Issue Dt:
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07/07/2015
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Application #:
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13473529
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Filing Dt:
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05/16/2012
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Publication #:
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Pub Dt:
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11/21/2013
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Title:
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Light Collector Mirror Cleaning
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Patent #:
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Issue Dt:
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11/18/2014
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Application #:
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13778006
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Filing Dt:
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02/26/2013
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Title:
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System Method and Apparatus for Selecting and Controlling Light Source Bandwidth
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