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Reel/Frame:018104/0530   Pages: 3
Recorded: 07/13/2006
Attorney Dkt #:2557-000440/US
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
02/17/2009
Application #:
11485523
Filing Dt:
07/13/2006
Publication #:
Pub Dt:
02/01/2007
Title:
METHOD OF FORMING A ZRO2 THIN FILM USING PLASMA ENHANCED ATOMIC LAYER DEPOSITION AND METHOD OF FABRICATING A CAPACITOR OF A SEMICONDUCTOR MEMORY DEVICE HAVING THE THIN FILM
Assignors
1
Exec Dt:
06/29/2006
2
Exec Dt:
06/29/2006
3
Exec Dt:
06/29/2006
4
Exec Dt:
07/01/2006
5
Exec Dt:
06/29/2006
Assignee
1
416 MAETAN-DONG, YEONGTONG-GU
SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Correspondence name and address
HARNESS, DICKEY & PIERCE, P.L.C.
P.O. BOX 8910
RESTON, VA 20195

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