Patent Assignment Details
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| Reel/Frame: | 007003/0533 | |
| Pages: | 3 |
| | Recorded: | 05/17/1994 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/12/1996
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Application #:
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08243783
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Filing Dt:
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05/17/1994
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Title:
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METHOD FOR ANISOTROPIC PLASMA ETCHING OF SUBSTRATES
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Assignee
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| WEBERSTRASSE 1 |
| D-70442 STUTTGART, GERMAN DEMOCRATIC REPUBLIC |
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Correspondence name and address
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SPENCER, FRANK & SCHNEIDER
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GEORGE H. SPENCER
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SUITE 300 EAST
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1100 NEW YORK AVENUE, N.W.
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WASHINGTON, D.C. 20005-3955
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