Patent Assignment Details
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Reel/Frame: | 009361/0535 | |
| Pages: | 3 |
| | Recorded: | 07/29/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/06/2001
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Application #:
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09124009
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Filing Dt:
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07/29/1998
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Title:
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COATING AND DEVELOPING APPARATUS, COMPLEX APPARATUS AND PROCESSING METHOD IN COATING AND DEVELOPING APPARATUS
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Assignee
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3-6 AKASAKA 5-CHOME, MINATO-KU |
TOKYO 107-8481, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER, ET AL
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C. IRVIN MCCLELLAND
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FOURTH FLOOR
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1755 JEFFERSON DAVIS HIGHWAY
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ARLINGTON, VIRGINIA 22202
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