Patent Assignment Details
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| Reel/Frame: | 025676/0536 | |
| Pages: | 5 |
| | Recorded: | 01/21/2011 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13011052
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Filing Dt:
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01/21/2011
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Publication #:
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Pub Dt:
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07/26/2012
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Title:
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PARALLEL MULTI WAFER AXIAL SPIN CLEAN PROCESSING USING SPIN CASSETTE INSIDE MOVABLE PROCESS CHAMBER
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Assignees
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| 12100 SAMSUNG BLVD. |
| AUSTIN, TEXAS 78754 |
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| 416, MAETAN-DONG, YEONGTONG-GU, SUWON-SI, |
| GYEONGGI-DO 442-370, KOREA, REPUBLIC OF |
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Correspondence name and address
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DOCKET CLERK
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P.O. DRAWER 800889
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DALLAS, TX 75380
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