Patent Assignment Details
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Reel/Frame: | 028882/0539 | |
| Pages: | 5 |
| | Recorded: | 08/31/2012 | | |
Attorney Dkt #: | 02887.0817-00000 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/10/2015
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Application #:
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13600860
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Filing Dt:
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08/31/2012
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Publication #:
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Pub Dt:
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03/07/2013
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Title:
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SUPERCRLTICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE
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Assignee
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1-1, SHIBAURA 1-CHOME, MINATO-KU |
TOKYO, JAPAN |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW, GARRETT &
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901 NEW YORK AVENUE, NW
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WASHINGTON, DC 20001-4413
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