Patent Assignment Details
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Reel/Frame: | 035721/0541 | |
| Pages: | 9 |
| | Recorded: | 05/27/2015 | | |
Attorney Dkt #: | HITACHI13-0000298US02 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/13/2016
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Application #:
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14719097
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Filing Dt:
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05/21/2015
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Publication #:
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Pub Dt:
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09/10/2015
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Assignee
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14-1, SOTOKANDA 4-CHOME, |
CHIYODA-KU |
TOKYO, JAPAN 1018980 |
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Correspondence name and address
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VOLPE AND KOENIG, P.C.
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30 S. 17TH STREET
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UNITED PLAZA
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PHILADELPHIA, PA 19103
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