Total properties:
20
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Patent #:
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Issue Dt:
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06/27/2006
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Application #:
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10765147
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Filing Dt:
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01/28/2004
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Publication #:
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Pub Dt:
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09/23/2004
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/01/2007
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Application #:
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11019111
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Filing Dt:
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12/22/2004
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Publication #:
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Pub Dt:
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09/15/2005
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Title:
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ELECTRON BEAM APPARATUS WITH DETAILED OBSERVATION FUNCTION AND SAMPLE INSPECTING AND OBSERVING METHOD USING ELECTRON BEAM APPARATUS
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Patent #:
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Issue Dt:
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08/29/2006
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Application #:
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11134330
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Filing Dt:
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05/23/2005
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Publication #:
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Pub Dt:
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09/22/2005
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Title:
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ELECTRON BEAM APPARATUS AND DEVICE MANUFACTURING METHOD USING SAME
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Patent #:
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Issue Dt:
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04/01/2008
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Application #:
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11723591
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Filing Dt:
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03/21/2007
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Publication #:
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Pub Dt:
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08/30/2007
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Title:
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ELECTRON BEAM APPARATUS WITH DETAILED OBSERVATION FUNCTION AND SAMPLE INSPECTING AND OBSERVING METHOD USING ELECTRON BEAM APPARATUS
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Patent #:
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Issue Dt:
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04/15/2014
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Application #:
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11730891
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Filing Dt:
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04/04/2007
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Publication #:
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Pub Dt:
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10/11/2007
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Title:
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Polishing apparatus and polishing method
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Patent #:
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Issue Dt:
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01/04/2011
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Application #:
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11760235
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Filing Dt:
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06/08/2007
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Publication #:
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Pub Dt:
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03/20/2008
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Title:
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ELECTRON BEAM APPARATUS AND AN ABERRATION CORRECTION OPTICAL APPARATUS
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Patent #:
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Issue Dt:
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08/03/2010
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Application #:
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11882398
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Filing Dt:
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08/01/2007
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Publication #:
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Pub Dt:
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12/13/2007
| | | | |
Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/31/2011
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Application #:
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12162071
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Filing Dt:
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07/24/2008
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Publication #:
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Pub Dt:
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01/29/2009
| | | | |
Title:
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APPARATUS AND METHOD FOR INSPECTING SAMPLE SURFACE
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Patent #:
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Issue Dt:
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02/08/2011
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Application #:
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12184032
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Filing Dt:
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07/31/2008
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Publication #:
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Pub Dt:
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12/25/2008
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Title:
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SUBSTRATE HOLDING MECHANISM, SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
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Patent #:
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Issue Dt:
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12/13/2011
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Application #:
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12289507
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Filing Dt:
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10/29/2008
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Publication #:
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Pub Dt:
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04/30/2009
| | | | |
Title:
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POLISHING APPARATUS AND POLISHING METHOD
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Patent #:
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Issue Dt:
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10/08/2013
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Application #:
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12311560
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Filing Dt:
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04/03/2009
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Publication #:
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Pub Dt:
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01/21/2010
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Title:
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Processing end point detection method, polishing method,and polishing apparatus
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Patent #:
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Issue Dt:
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09/25/2012
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Application #:
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12537414
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Filing Dt:
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08/07/2009
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Publication #:
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Pub Dt:
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02/11/2010
| | | | |
Title:
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SUBSTRATE SURFACE INSPECTION METHOD AND INSPECTION APPARATUS
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Patent #:
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Issue Dt:
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10/23/2012
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Application #:
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12618033
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Filing Dt:
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11/13/2009
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Publication #:
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Pub Dt:
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03/11/2010
| | | | |
Title:
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SUBSTRATE HOLDING MECHANISM, SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
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Patent #:
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Issue Dt:
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08/13/2013
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Application #:
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12667891
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Filing Dt:
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01/06/2010
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Publication #:
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Pub Dt:
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01/06/2011
| | | | |
Title:
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POLISHING APPARATUS AND POLISHING METHOD
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Patent #:
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Issue Dt:
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03/05/2013
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Application #:
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12700917
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Filing Dt:
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02/05/2010
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Publication #:
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Pub Dt:
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06/17/2010
| | | | |
Title:
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SUBSTRATE POLISHING APPARATUS
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Patent #:
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Issue Dt:
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10/29/2013
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Application #:
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12897973
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Filing Dt:
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10/05/2010
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Publication #:
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Pub Dt:
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04/07/2011
| | | | |
Title:
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POLISHING ENDPOINT DETECTION APPARATUS
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Patent #:
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Issue Dt:
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05/21/2013
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Application #:
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13027551
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Filing Dt:
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02/15/2011
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Publication #:
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Pub Dt:
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08/25/2011
| | | | |
Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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02/04/2014
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Application #:
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13036114
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Filing Dt:
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02/28/2011
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Publication #:
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Pub Dt:
|
09/08/2011
| | | | |
Title:
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POLISHING APPARATUS AND POLISHING METHOD
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|
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Patent #:
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|
Issue Dt:
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02/19/2019
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Application #:
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14017620
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Filing Dt:
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09/04/2013
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Publication #:
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Pub Dt:
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01/02/2014
| | | | |
Title:
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PROCESSING END POINT DETECTION METHOD, POLISHING METHOD, AND POLISHING APPARATUS
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|
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Patent #:
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|
Issue Dt:
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07/15/2014
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Application #:
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14036321
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Filing Dt:
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09/25/2013
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Publication #:
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Pub Dt:
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01/23/2014
| | | | |
Title:
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POLISHING ENDPOINT DETECTION METHOD
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