Total properties:
11
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Patent #:
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Issue Dt:
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01/18/2011
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Application #:
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11335099
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Filing Dt:
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01/18/2006
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Publication #:
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Pub Dt:
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07/20/2006
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Title:
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END POINT DETECTION METHOD FOR PLASMA ETCHING OF SEMICONDUCTOR WAFERS WITH LOW EXPOSED AREA
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Patent #:
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Issue Dt:
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04/13/2010
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Application #:
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11409308
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Filing Dt:
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04/20/2006
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Title:
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USE OF MODELED PARAMETERS FOR REAL-TIME SEMICONDUCTOR PROCESS METROLOGY APPLIED TO SEMICONDUCTOR PROCESSES
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Patent #:
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Issue Dt:
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01/24/2012
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Application #:
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11525539
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Filing Dt:
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09/21/2006
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Title:
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HIGH-SPEED SECS MESSAGE SERVICES (HSMS) PASS-THROUGH INCLUDING BYPASS
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Patent #:
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Issue Dt:
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01/18/2011
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Application #:
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11787654
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Filing Dt:
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04/16/2007
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Publication #:
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Pub Dt:
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10/16/2008
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Title:
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SYSTEM AND METHOD FOR CONTROLLING PROCESS END-POINT UTILIZING LEGACY END-POINT SYSTEM
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Patent #:
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Issue Dt:
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05/03/2011
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Application #:
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11821810
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Filing Dt:
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06/25/2007
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Title:
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DATA TIMESTAMP MANAGEMENT
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Patent #:
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Issue Dt:
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07/20/2010
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Application #:
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11855052
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Filing Dt:
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09/13/2007
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Title:
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TECHNIQUES FOR CALIBRATION OF GAS FLOWS
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Patent #:
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Issue Dt:
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09/15/2009
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Application #:
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11948907
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Filing Dt:
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11/30/2007
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Title:
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SYSTEM AND METHOD FOR VACUUM CHAMBER LEAK DETECTION
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Patent #:
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Issue Dt:
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05/10/2011
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Application #:
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12184574
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Filing Dt:
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08/01/2008
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Publication #:
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Pub Dt:
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07/16/2009
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Title:
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METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS
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Patent #:
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Issue Dt:
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11/02/2010
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Application #:
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12354723
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Filing Dt:
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01/15/2009
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Publication #:
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Pub Dt:
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07/23/2009
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Title:
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METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
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Patent #:
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Issue Dt:
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08/14/2012
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Application #:
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12355654
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Filing Dt:
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01/16/2009
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Publication #:
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Pub Dt:
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07/23/2009
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Title:
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METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
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Patent #:
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Issue Dt:
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03/12/2013
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Application #:
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12509375
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Filing Dt:
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07/24/2009
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Publication #:
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Pub Dt:
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01/28/2010
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Title:
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METHOD AND APPARATUS FOR THE MEASUREMENT OF ATMOSPHERIC LEAKS IN THE PRESENCE OF CHAMBER OUTGASSING
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