Patent Assignment Details
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| Reel/Frame: | 013912/0545 | |
| Pages: | 4 |
| | Recorded: | 04/02/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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10314727
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Filing Dt:
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12/09/2002
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Publication #:
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Pub Dt:
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06/10/2004
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Title:
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METHOD AND APPARATUS FOR THE ABATEMENT OF TOXIC GAS COMPONENTS FROM A SEMICONDUCTOR MANUFACTURING PROCESS EFFLUENT STREAM
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Assignee
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| 7 COMMERCE DRIVE |
| DANBURY, CONNECTICUT 06810 |
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Correspondence name and address
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ADVANCED TECHNOLOGY MATERIALS, INC.
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WILLIAM F. RYANN, ESQ.
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7 COMMERCE DRIVE
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DANBURY, CONNECTICUT 06810
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