Total properties:
35
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Patent #:
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Issue Dt:
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10/19/1993
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Application #:
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07696897
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Filing Dt:
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05/07/1991
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Title:
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SYSTEM FOR REMOVING MATERIAL FROM A WAFER
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Patent #:
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Issue Dt:
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07/26/1994
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Application #:
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07804872
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Filing Dt:
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12/06/1991
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Title:
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APPARATUS AND METHOD FOR INTERFEROMETAICALLY MEASURING THE THICKNESS OF THIN FILMS USING FULL APERTURE IRRADIATION
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Patent #:
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Issue Dt:
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08/09/1994
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Application #:
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07807535
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Filing Dt:
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12/13/1991
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Title:
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METHODS AND APPARATUS FOR CONFINEMENT OF A PLASMA ETCH REGION FOR PRECISION SHAPING OF SURFACES OF SUBSTANCES AND FILMS
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Patent #:
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Issue Dt:
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03/01/1994
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Application #:
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07807536
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Filing Dt:
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12/13/1991
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Title:
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METHODS AND APPARATUS FOR GENERATING A PLASMA FOR "DOWNSTREAM" RAPID SHAPING OF SURFACES OF SUBSTRATES AND FILMS
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Patent #:
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Issue Dt:
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03/01/1994
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Application #:
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07807544
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Filing Dt:
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12/13/1991
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Title:
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METHOD TO DETERMINE TOOL PATHS FOR THINNING AND CORRECTING ERRORS IN THICKNESS PROFILES OF FILMS
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Patent #:
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Issue Dt:
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08/24/1993
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Application #:
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07842828
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Filing Dt:
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02/27/1992
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Title:
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METHOD AND APPARATUS FOR REMOVAL OF SUBSURFACE DAMAGE IN SEMICONDUCTOR MATERIALS BY PLASMA ETCHING
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Patent #:
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Issue Dt:
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12/27/1994
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Application #:
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07842936
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Filing Dt:
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02/27/1992
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Title:
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METHOD AND APPARATUS FOR NON-CONTACT PLASMA POLISHING AND SMOOTHING OF UNIFORMLY THINNED SUBSTRATES
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Patent #:
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Issue Dt:
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03/08/1994
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Application #:
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07854718
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Filing Dt:
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03/23/1992
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Title:
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METHOD AND APPARATUS FOR PRODUCING VARIABLE SPATIAL FREQUENCY CONTROL IN PLASMA ASSISTED CHEMICAL ETCHING
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Patent #:
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Issue Dt:
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11/15/1994
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Application #:
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07855404
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Filing Dt:
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03/23/1992
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Title:
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APPARATUS AND METHOD FOR SHIELDING A WORKPIECE HOLDING MECHANISM FROM DEPRECIATIVE EFFECTS DURING WORKPIECE PROCESSING
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Patent #:
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Issue Dt:
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03/08/1994
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Application #:
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07891344
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Filing Dt:
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05/29/1992
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Title:
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APPARATUS AND METHOD FOR PERFORMING THIN FILM LAYER THICKNESS METROLOGY BY DEFORMING A THIN FILM LAYER INTO A REFLECTIVE CONDENSER
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Patent #:
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Issue Dt:
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02/01/1994
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Application #:
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07899419
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Filing Dt:
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06/16/1992
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Title:
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APPARATUS AND METHOD FOR OPTIMALLY SCANNING A TWO-DIMENSIONAL SURFACE OF ONE OR MORE OBJECTS
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Patent #:
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Issue Dt:
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03/01/1994
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Application #:
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07906079
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Filing Dt:
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06/29/1992
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Title:
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APPARATUS AND METHOD FOR PERFORMING THIN FILM LAYER THICKNESS METROLOGY ON A THIN FILM LAYER HAVING SHAPE DEFORMATIONS AND LOCAL SLOPE VARIATIONS
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Patent #:
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Issue Dt:
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08/09/1994
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Application #:
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07925721
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Filing Dt:
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08/04/1992
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Title:
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APPARATUS AND METHOD FOR PERFORMING THIN FILM LAYER THICKNESS METROLOGY USING A CORRELATION REFLECTOMETER
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Patent #:
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Issue Dt:
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10/04/1994
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Application #:
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07937793
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Filing Dt:
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08/28/1992
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Title:
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APPARATUS FOR PROVIDING CONSISTENT, NON-JAMMING REGISTRATION OF SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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11/08/1994
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Application #:
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07986650
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Filing Dt:
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12/08/1992
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Title:
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FLUID MIXER
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Patent #:
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Issue Dt:
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11/15/1994
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Application #:
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07987926
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Filing Dt:
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12/10/1992
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Title:
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APPARATUS AND METHOD FOR MEASURING THE THICKNESS OF THIN FILMS
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Patent #:
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Issue Dt:
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05/17/1994
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Application #:
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08036310
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Filing Dt:
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03/24/1993
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Title:
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APPARATUS FOR OPTIMALLY SCANNING A TWO-DIMENSIONAL SURFACE OF ONE OR MORE OBJECTS
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Patent #:
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Issue Dt:
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01/31/1995
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Application #:
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08037069
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Filing Dt:
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03/25/1993
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Title:
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APPARATUS AND METHOD FOR THICK WAFER MEASUREMENT
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Patent #:
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Issue Dt:
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03/29/1994
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Application #:
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08093120
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Filing Dt:
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07/15/1993
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Title:
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ELECTRODE ASSEMBLY USEFUL IN CONFINED PLASMA ASSISTED CHEMICAL ETCHING
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Patent #:
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Issue Dt:
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11/15/1994
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Application #:
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08110021
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Filing Dt:
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08/20/1993
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Title:
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HIGHLY DURABLE NONCONTAMINATING SURROUND MATERIALS FOR PLASMA ETCHING
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Patent #:
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Issue Dt:
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09/26/1995
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Application #:
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08134728
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Filing Dt:
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10/12/1993
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Title:
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FILM THICKNESS MEASUREMENT OF STRUCTURES CONTAINING A SCATTERING SURFACE
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Patent #:
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Issue Dt:
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07/25/1995
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Application #:
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08134729
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Filing Dt:
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10/12/1993
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Title:
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COFOCAL OPTICAL SYSTEM FOR THICKNESS MEASUREMENTS OF PATTERNED WAFERS
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Patent #:
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Issue Dt:
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03/11/1997
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Application #:
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08152780
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Filing Dt:
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11/15/1993
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Title:
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METHOD FOR CO-REGISTERING SEMICONDUCTOR WAFERS UNDERGOING WORK IN ONE OR MORE BLIND PROCESS MODULES
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Patent #:
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Issue Dt:
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12/12/1995
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Application #:
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08153236
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Filing Dt:
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11/15/1993
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Title:
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WAFER FLOW ARCHITECTURE FOR PRODUCTION WAFER PROCESSING
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Patent #:
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Issue Dt:
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05/30/1995
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Application #:
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08153681
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Filing Dt:
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11/17/1993
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Title:
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METHOD OF PLANARIZING MICROSTRUCTURES
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Patent #:
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Issue Dt:
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12/20/1994
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Application #:
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08162510
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Filing Dt:
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12/02/1993
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Title:
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METHOD AND APPARATUS FOR A MATERIAL REMOVAL TOOL WITH LOW TOL ACCELERA TIONS
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Patent #:
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Issue Dt:
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09/10/1996
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Application #:
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08179594
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Filing Dt:
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12/22/1993
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Title:
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METHOD AND APPARATUS FOR MEASURING FILM THICKNESS IN MULTILAYER THIN FILM STACK BY COMPARISON TO A REFERENCE LIBRARY OF THEORETICAL SIGNATURES
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Patent #:
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Issue Dt:
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12/13/1994
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Application #:
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08189262
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Filing Dt:
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01/28/1994
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Title:
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ELECTRODE FOR USE IN A PLASMA ASSISTED CHEMICAL ETCHING PROCESS
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Patent #:
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Issue Dt:
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02/21/1995
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Application #:
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08252630
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Filing Dt:
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06/02/1994
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Title:
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PLASMA PRESSURE CONTROL ASSEMBLY
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|
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Patent #:
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Issue Dt:
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03/26/1996
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Application #:
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08304982
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Filing Dt:
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09/13/1994
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Title:
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SUBSTRATE THICKNESS MEASUREMENT USING OBLIQUE INCIDENCE MULTISPECTRAL INTERFEROMETRY
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Patent #:
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Issue Dt:
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10/08/1996
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Application #:
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08304983
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Filing Dt:
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09/13/1994
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Title:
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APPARATUS FOR MEASURING, THINNING AND FLATTENING SILICON STRUCTURES
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Patent #:
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Issue Dt:
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05/07/1996
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Application #:
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08304984
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Filing Dt:
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09/13/1994
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Title:
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TRANSPARENT OPTICAL CHUCK INCORPORATING OPTICAL MONITORING
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Patent #:
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Issue Dt:
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08/06/1996
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Application #:
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08309516
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Filing Dt:
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09/20/1994
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Title:
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APPARATUS AND METHOD FOR PERFORMING HIGH SPATIAL RESOLUTION THIN FILM LAYER THICKNESS METROLOGY
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Patent #:
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Issue Dt:
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10/22/1996
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Application #:
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08322820
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Filing Dt:
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10/13/1994
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Title:
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SOLID ANNULAR GAS DISCHARGE ELECTRODE
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Patent #:
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Issue Dt:
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09/10/1996
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Application #:
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08360535
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Filing Dt:
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12/21/1994
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Title:
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AUTOMATIC REJECTION OF DIFFRACTION EFFECTS IN THIN FILM METROLOGY
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