Patent Assignment Details
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Reel/Frame: | 008777/0548 | |
| Pages: | 3 |
| | Recorded: | 08/20/1997 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/04/2000
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Application #:
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08914819
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Filing Dt:
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08/20/1997
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Title:
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APPARATUS FOR FORMING COATING FILM FOR SEMICONDUCTOR PROCESSING
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Assignee
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3-6 AKASAKA 5-CHOME, MINATO-KU |
TOKYO 107, JAPAN |
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Correspondence name and address
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OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT
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DAVID J. SPIVAK
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FOURTH FLOOR
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1755 JEFFERSON DAVIS HIGHWAY
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ARLINGTON, VA 22202
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