Patent Assignment Details
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Reel/Frame: | 009880/0549 | |
| Pages: | 2 |
| | Recorded: | 03/31/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09282644
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Filing Dt:
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03/31/1999
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Title:
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METHOD AND APPARATUS FOR COMPENSATING NON-UNIFORM WAFER PROCESSING IN PLASMA PROCESSING CHAMBER
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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MARTINE PENILLA & KIM, LLP
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RAYMIS H. KIM
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830 WEST EVELYN AVENUE
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SUNNYVALE, CALIFORNIA 94086
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