Patent Assignment Details
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| Reel/Frame: | 013102/0550 | |
| Pages: | 3 |
| | Recorded: | 07/12/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/14/2004
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Application #:
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10194526
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Filing Dt:
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07/12/2002
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Publication #:
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Pub Dt:
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01/15/2004
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Title:
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WAFER PROBE FOR MEASURING PLASMA AND SURFACE CHARACTERISTICS IN PLASMA PROCESSING ENVIROMENTS
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Assignee
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| 1625 SHARP POINT DR. |
| FORT COLLINS, COLORADO 80525 |
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Correspondence name and address
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ADVANCED ENERGY INDUSTRIES
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BENJAMIN HUDSON, JR.
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1625 SHARP POINT DR.
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FORT COLLINS, CO 80525
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