Patent Assignment Details
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Reel/Frame: | 013661/0550 | |
| Pages: | 4 |
| | Recorded: | 01/13/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/29/2005
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Application #:
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10341913
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Filing Dt:
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01/13/2003
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Publication #:
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Pub Dt:
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04/01/2004
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Title:
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METHOD FOR TOOLMATCHING AND TROUBLESHOOTING A PLASMA PROCESSING SYSTEM
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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THELEN REID & PRIEST LLP
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THIERRY K. LO
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P.O. BOX 640640
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SAN JOSE, CA 95164-0640
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