Patent Assignment Details
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Reel/Frame: | 010465/0551 | |
| Pages: | 2 |
| | Recorded: | 12/30/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/12/2000
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Application #:
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09409842
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Filing Dt:
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09/30/1999
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Title:
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METHOD AND APPARATUS FOR IN-SITU MONITORING OF PLASMA ETCH AND DEPOSITION PROCESSES USING A PULSED BROADBAND LIGHT SOURCE
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Assignee
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4650 CUSHING PARKWAY, BUILDING CA-1 |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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HICKMAN STEPHENS COLEMAN & HUGHES, LLP
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BRIAN R. COLEMAN
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P.O. BOX 52037
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PALO ALTO, CALIFORNIA 94303-0746
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