Patent Assignment Details
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Reel/Frame: | 051990/0554 | |
| Pages: | 2 |
| | Recorded: | 02/21/2020 | | |
Attorney Dkt #: | P98242US GSC NSF |
Conveyance: | CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/15/2000
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Application #:
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09182057
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Filing Dt:
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10/29/1998
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Title:
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WALL DEPOSITION THICKNESS SENSOR FOR PLASMA PROCESSING CHAMBER
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Assignee
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2415 EISENHOWER AVENUE |
ALEXANDRIA, VIRGINIA 22314 |
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Correspondence name and address
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MEREDITH NORIEGA
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614 WALNUT STREET
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13TH FLOOR
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MADISON, WI 53726
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