Total properties:
30
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Patent #:
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Issue Dt:
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05/02/2006
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Application #:
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10689666
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Filing Dt:
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10/22/2003
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Publication #:
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Pub Dt:
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05/06/2004
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Title:
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PHOTOMASK DEFECT TESTING METHOD, PHOTOMASK MANUFACTURING METHOD AND SEMICONDUCTOR INTEGRATED CIRCUIT MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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04/01/2008
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Application #:
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10968886
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Filing Dt:
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10/21/2004
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Publication #:
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Pub Dt:
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05/26/2005
| | | | |
Title:
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PHASE SHIFT MASK BLANK, PHASE SHIFT MASK, AND PATTERN TRANSFER METHOD
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Patent #:
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Issue Dt:
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07/07/2009
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Application #:
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11093295
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Filing Dt:
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03/30/2005
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Publication #:
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Pub Dt:
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11/03/2005
| | | | |
Title:
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HALFTONE PHASE SHIFT MASK BLANK, HALFTONE PHASE SHIFT MASK, AND PATTERN TRANSFER METHOD
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Patent #:
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Issue Dt:
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12/01/2009
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Application #:
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11255135
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Filing Dt:
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10/21/2005
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Publication #:
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Pub Dt:
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04/27/2006
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Title:
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PHOTOMASK BLANK, PHOTOMASK AND FABRICATION METHOD THEREOF
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Patent #:
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Issue Dt:
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12/01/2009
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Application #:
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11346224
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Filing Dt:
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02/03/2006
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Publication #:
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Pub Dt:
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08/10/2006
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Title:
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HALF-TONE STACKED FILM, PHOTOMASK-BLANK, PHOTOMASK AND FABRICATION METHOD THEREOF
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Patent #:
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Issue Dt:
|
08/10/2010
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Application #:
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11489477
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Filing Dt:
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07/20/2006
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Publication #:
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Pub Dt:
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01/25/2007
| | | | |
Title:
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PHOTOMASK BLANK, PHOTOMASK AND FABRICATION METHOD THEREOF
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|
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Patent #:
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|
Issue Dt:
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04/06/2010
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Application #:
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11662183
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Filing Dt:
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03/08/2007
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Publication #:
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Pub Dt:
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03/13/2008
| | | | |
Title:
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PHOTOMASK BLANK AND PHOTOMASK
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Patent #:
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|
Issue Dt:
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11/17/2009
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Application #:
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11662479
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Filing Dt:
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03/12/2007
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Publication #:
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Pub Dt:
|
11/08/2007
| | | | |
Title:
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PHOTOMASK BLANK, PHOTOMASK AND METHOD FOR PRODUCING THOSE
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Patent #:
|
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Issue Dt:
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08/03/2010
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Application #:
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11715346
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Filing Dt:
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03/08/2007
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Publication #:
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Pub Dt:
|
09/13/2007
| | | | |
Title:
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PHOTOMASK BLANK AND PHOTOMASK
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Patent #:
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|
Issue Dt:
|
08/03/2010
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Application #:
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11715368
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Filing Dt:
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03/08/2007
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Publication #:
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Pub Dt:
|
09/13/2007
| | | | |
Title:
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PHOTOMASK BLANK AND PHOTOMASK MAKING METHOD
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Patent #:
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Issue Dt:
|
09/07/2010
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Application #:
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11785689
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Filing Dt:
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04/19/2007
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Publication #:
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Pub Dt:
|
10/25/2007
| | | | |
Title:
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PHOTOMASK BLANK
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|
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Patent #:
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|
Issue Dt:
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03/12/2013
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Application #:
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12232757
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Filing Dt:
|
09/23/2008
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Publication #:
|
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Pub Dt:
|
02/12/2009
| | | | |
Title:
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REFLECTION TYPE PHOTOMASK BLANK, MANUFACTURING METHOD THEREOF, REFLECTION TYPE PHOTOMASK, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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|
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Patent #:
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|
Issue Dt:
|
08/30/2011
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Application #:
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12709116
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Filing Dt:
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02/19/2010
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Publication #:
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|
Pub Dt:
|
06/10/2010
| | | | |
Title:
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PHOTOMASK BLANK AND PHOTOMASK
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|
|
Patent #:
|
|
Issue Dt:
|
08/02/2011
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Application #:
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12820908
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Filing Dt:
|
06/22/2010
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Publication #:
|
|
Pub Dt:
|
10/14/2010
| | | | |
Title:
|
PHOTOMASK BLANK AND PHOTOMASK MAKING METHOD
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|
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Patent #:
|
|
Issue Dt:
|
08/23/2011
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Application #:
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12820918
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Filing Dt:
|
06/22/2010
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Publication #:
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|
Pub Dt:
|
10/14/2010
| | | | |
Title:
|
PHOTOMASK BLANK AND PHOTOMASK
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|
|
Patent #:
|
|
Issue Dt:
|
09/06/2011
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Application #:
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12820927
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Filing Dt:
|
06/22/2010
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Publication #:
|
|
Pub Dt:
|
10/14/2010
| | | | |
Title:
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PHOTOMASK BLANK AND PHOTOMASK
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|
|
Patent #:
|
|
Issue Dt:
|
12/01/2015
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Application #:
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12926496
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Filing Dt:
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11/22/2010
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Publication #:
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Pub Dt:
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03/24/2011
| | | | |
Title:
|
Verification and modification method of rules of do-not-inspect regions, computer program, and apparatus for such verification and modification
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|
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Patent #:
|
|
Issue Dt:
|
07/02/2013
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Application #:
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13228501
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Filing Dt:
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09/09/2011
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Publication #:
|
|
Pub Dt:
|
03/15/2012
| | | | |
Title:
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PHOTOMASK BLANK AND MAKING METHOD, PHOTOMASK, LIGHT PATTERN EXPOSURE METHOD, AND DESIGN METHOD OF TRANSITION METAL/SILICON BASE MATERIAL FILM
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|
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Patent #:
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|
Issue Dt:
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02/24/2015
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Application #:
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13262321
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Filing Dt:
|
09/30/2011
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Publication #:
|
|
Pub Dt:
|
01/26/2012
| | | | |
Title:
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REFLECTIVE PHOTOMASK AND REFLECTIVE PHOTOMASK BLANK
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|
|
Patent #:
|
|
Issue Dt:
|
06/17/2014
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Application #:
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13682188
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Filing Dt:
|
11/20/2012
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Publication #:
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|
Pub Dt:
|
05/23/2013
| | | | |
Title:
|
LIGHT PATTERN EXPOSURE METHOD, HALFTONE PHASE SHIFT MASK, AND HALFTONE PHASE SHIFT MASK BLANK
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|
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Patent #:
|
|
Issue Dt:
|
06/17/2014
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Application #:
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13682228
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Filing Dt:
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11/20/2012
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Publication #:
|
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Pub Dt:
|
05/23/2013
| | | | |
Title:
|
LIGHT PATTERN EXPOSURE METHOD, PHOTOMASK, AND PHOTOMASK BLANK
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|
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Patent #:
|
|
Issue Dt:
|
03/15/2016
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Application #:
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14187885
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Filing Dt:
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02/24/2014
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Publication #:
|
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Pub Dt:
|
06/19/2014
| | | | |
Title:
|
REFLECTIVE MASK AND METHOD FOR MANUFACTURING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
09/13/2016
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Application #:
|
14221994
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Filing Dt:
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03/21/2014
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Publication #:
|
|
Pub Dt:
|
07/24/2014
| | | | |
Title:
|
MASK BLANK FOR REFLECTION-TYPE EXPOSURE, AND MASK FOR REFLECTION-TYPE EXPOSURE
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|
|
Patent #:
|
|
Issue Dt:
|
03/27/2018
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Application #:
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15057548
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Filing Dt:
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03/01/2016
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Publication #:
|
|
Pub Dt:
|
06/23/2016
| | | | |
Title:
|
REFLECTIVE PHOTOMASK AND PRODUCTION METHOD THEREFOR
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|
|
Patent #:
|
|
Issue Dt:
|
08/06/2019
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Application #:
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15138960
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Filing Dt:
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04/26/2016
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Publication #:
|
|
Pub Dt:
|
10/26/2017
| | | | |
Title:
|
REFLECTIVE MASK, REFLECTIVE MASK BLANK, AND MANUFACTURING METHOD THEREFOR
|
|
|
Patent #:
|
|
Issue Dt:
|
11/30/2021
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Application #:
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16578938
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Filing Dt:
|
09/23/2019
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Publication #:
|
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Pub Dt:
|
01/09/2020
| | | | |
Title:
|
PHOTOMASK BLANK, PHOTOMASK, AND PHOTOMASK MANUFACTURING METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
07/20/2021
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Application #:
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16625652
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Filing Dt:
|
12/20/2019
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Publication #:
|
|
Pub Dt:
|
07/09/2020
| | | | |
Title:
|
REFLECTIVE PHOTOMASK BLANK AND REFLECTIVE PHOTOMASK
|
|
|
Patent #:
|
|
Issue Dt:
|
04/05/2022
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Application #:
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16626290
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Filing Dt:
|
12/23/2019
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Publication #:
|
|
Pub Dt:
|
05/21/2020
| | | | |
Title:
|
REFLECTIVE PHOTOMASK BLANK AND REFLECTIVE PHOTOMASK
|
|
|
Patent #:
|
|
Issue Dt:
|
02/20/2024
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Application #:
|
17292409
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Filing Dt:
|
05/07/2021
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Publication #:
|
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Pub Dt:
|
01/13/2022
| | | | |
Title:
|
REFLECTIVE PHOTOMASK BLANK AND REFLECTIVE PHOTOMASK
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
17615083
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Filing Dt:
|
11/29/2021
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Publication #:
|
|
Pub Dt:
|
07/14/2022
| | | | |
Title:
|
REFLECTIVE PHOTOMASK BLANK AND REFLECTIVE PHOTOMASK
|
|