Patent Assignment Details
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| Reel/Frame: | 017786/0557 | |
| Pages: | 3 |
| | Recorded: | 04/11/2006 | | |
| Attorney Dkt #: | 05542-539002 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/05/2007
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Application #:
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11402522
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Filing Dt:
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04/11/2006
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Publication #:
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Pub Dt:
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08/17/2006
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Title:
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PLATEN AND HEAD ROTATION RATES FOR MONITORING CHEMICAL MECHANICAL POLISHING
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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FISH & RICHARDSON P.C.
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P.O. BOX 1022
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MINNEAPOLIS, MN 55440-1022
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