Patent Assignment Details
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Reel/Frame: | 016532/0562 | |
| Pages: | 3 |
| | Recorded: | 05/06/2005 | | |
Conveyance: | CORRECTED ASSIGNMENT-1ST AND 2ND INVENTORS NAMES INCORRECTLY REVERSED DUE TO ERROR ON THE PART OF THE APPLICANT |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/13/2008
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Application #:
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10924983
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Filing Dt:
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08/25/2004
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Publication #:
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Pub Dt:
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03/03/2005
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Title:
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DRY ETCHING METHOD AND APPARATUS
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Assignee
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16-3, HIGASHI 3-CHOME, SHIBUYA-KU |
TOKYO, JAPAN |
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Correspondence name and address
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ANTONELLI, TERRY, STOUT & KRAUS, LLP
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1300 NORTH 17TH STREET
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SUITE 1800
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ARLINGTON, VA 22209
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