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Total properties:
39
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Patent #:
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Issue Dt:
|
03/23/2004
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Application #:
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10130586
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Filing Dt:
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05/16/2002
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Title:
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X-RAY FLUORESCENCE APPARATUS
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Patent #:
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Issue Dt:
|
10/24/2006
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Application #:
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10626630
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Filing Dt:
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07/25/2003
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Publication #:
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Pub Dt:
|
07/08/2004
| | | | |
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Title:
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SOLLER SLIT USING LOW DENSITY MATERIALS
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Patent #:
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Issue Dt:
|
06/27/2006
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Application #:
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10668642
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Filing Dt:
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09/23/2003
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Publication #:
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Pub Dt:
|
01/06/2005
| | | | |
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Title:
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VACUUM ULTRAVIOLET REFLECTOMETER SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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07/01/2008
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Application #:
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10668644
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Filing Dt:
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09/23/2003
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Publication #:
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Pub Dt:
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01/06/2005
| | | | |
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Title:
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VACUUM ULTRAVIOLET REFERENCING REFLECTOMETER
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Patent #:
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Issue Dt:
|
04/11/2006
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Application #:
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10669030
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Filing Dt:
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09/23/2003
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Publication #:
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Pub Dt:
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01/06/2005
| | | | |
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Title:
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SEMICONDUCTOR PROCESSING TECHNIQUES UTILIZING VACUUM ULTRAVIOLET REFLECTOMETER
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Patent #:
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Issue Dt:
|
10/24/2006
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Application #:
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10909126
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Filing Dt:
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07/30/2004
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Publication #:
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Pub Dt:
|
01/13/2005
| | | | |
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Title:
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BROAD BAND REFERENCING REFLECTOMETER
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|
|
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Patent #:
|
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Issue Dt:
|
07/15/2008
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Application #:
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10930219
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Filing Dt:
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08/31/2004
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Publication #:
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Pub Dt:
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08/09/2007
| | | | |
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Title:
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METHOD AND APPARATUS FOR PERFORMING HIGHLY ACCURATE THIN FILM MEASUREMENTS
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|
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Patent #:
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Issue Dt:
|
09/28/2010
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Application #:
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10930339
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Filing Dt:
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08/31/2004
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Publication #:
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Pub Dt:
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08/09/2007
| | | | |
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Title:
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METHOD AND APPARATUS FOR ACCURATE CALIBRATION OF VUV REFLECTOMETER
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Patent #:
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Issue Dt:
|
09/18/2007
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Application #:
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11412802
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Filing Dt:
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04/27/2006
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Publication #:
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Pub Dt:
|
08/31/2006
| | | | |
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Title:
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VACUUM ULTRAVIOLET REFLECTOMETER HAVING COLLIMATED BEAM
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Patent #:
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Issue Dt:
|
03/13/2007
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Application #:
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11412810
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Filing Dt:
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04/27/2006
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Publication #:
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Pub Dt:
|
09/21/2006
| | | | |
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Title:
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VACUUM ULTRAVIOLET REFLECTOMETER INTEGRATED WITH PROCESSING SYSTEM
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|
|
|
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Patent #:
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|
Issue Dt:
|
10/16/2007
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Application #:
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11418827
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Filing Dt:
|
05/05/2006
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|
Publication #:
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Pub Dt:
|
08/09/2007
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR ACCURATE CALIBRATION OF A REFLECTOMETER BY USING A RELATIVE REFLECTANCE MEASUREMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/31/2009
|
Application #:
|
11418846
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Filing Dt:
|
05/05/2006
|
|
Publication #:
|
|
Pub Dt:
|
08/09/2007
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR ACCURATE CALIBRATION OF A REFLECTOMETER BY USING A RELATIVE REFLECTANCE MEASUREMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/19/2008
|
Application #:
|
11491962
|
Filing Dt:
|
07/25/2006
|
|
Publication #:
|
|
Pub Dt:
|
02/01/2007
| | | | |
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Title:
|
CURVED X-RAY REFLECTOR
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|
|
|
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Patent #:
|
|
Issue Dt:
|
11/04/2008
|
Application #:
|
11517894
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Filing Dt:
|
09/08/2006
|
|
Publication #:
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|
Pub Dt:
|
02/08/2007
| | | | |
|
Title:
|
Vacuum ultra-violet reflectometer with stray light correction
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|
|
|
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Patent #:
|
|
Issue Dt:
|
01/22/2008
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Application #:
|
11532162
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Filing Dt:
|
09/15/2006
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|
Publication #:
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Pub Dt:
|
03/15/2007
| | | | |
|
Title:
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MULTI-DETECTOR EDXRD
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|
|
|
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Patent #:
|
|
Issue Dt:
|
03/11/2008
|
Application #:
|
11600413
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Filing Dt:
|
11/16/2006
|
|
Title:
|
CONTAMINATION MONITORING AND CONTROL TECHNIQUES FOR USE WITH AN OPTICAL METROLOGY INSTRUMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/24/2009
|
Application #:
|
11600414
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Filing Dt:
|
11/16/2006
|
|
Publication #:
|
|
Pub Dt:
|
03/27/2008
| | | | |
|
Title:
|
CONTAMINATION MONITORING AND CONTROL TECHNIQUES FOR USE WITH AN OPTICAL METROLOGY INSTRUMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/16/2010
|
Application #:
|
11600477
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Filing Dt:
|
11/16/2006
|
|
Publication #:
|
|
Pub Dt:
|
01/07/2010
| | | | |
|
Title:
|
CONTAMINATION MONITORING AND CONTROL TECHNIQUES FOR USE WITH AN OPTICAL METROLOGY INSTRUMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/03/2009
|
Application #:
|
11711482
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Filing Dt:
|
02/27/2007
|
|
Publication #:
|
|
Pub Dt:
|
08/28/2008
| | | | |
|
Title:
|
PRISM SPECTROMETER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
03/23/2010
|
Application #:
|
11711592
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Filing Dt:
|
02/27/2007
|
|
Publication #:
|
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Pub Dt:
|
08/28/2008
| | | | |
|
Title:
|
SPECTROMETER WITH COLLIMATED INPUT LIGHT
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|
|
|
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Patent #:
|
|
Issue Dt:
|
08/25/2009
|
Application #:
|
11711908
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Filing Dt:
|
02/27/2007
|
|
Publication #:
|
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Pub Dt:
|
08/28/2008
| | | | |
|
Title:
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SPECTROMETER WITH MOVEABLE DETECTOR ELEMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/16/2010
|
Application #:
|
11789686
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Filing Dt:
|
04/25/2007
|
|
Publication #:
|
|
Pub Dt:
|
09/20/2007
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR ACCURATE CALIBRATION OF A REFLECTOMETER BY USING A RELATIVE REFLECTANCE MEASUREMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/24/2008
|
Application #:
|
11800026
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Filing Dt:
|
05/03/2007
|
|
Publication #:
|
|
Pub Dt:
|
02/21/2008
| | | | |
|
Title:
|
BROAD BAND REFERENCING REFLECTOMETER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/10/2012
|
Application #:
|
12454837
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Filing Dt:
|
05/22/2009
|
|
Publication #:
|
|
Pub Dt:
|
11/25/2010
| | | | |
|
Title:
|
AUTOMATED CALIBRATION METHODOLOGY FOR VUV METROLOGY SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/06/2011
|
Application #:
|
12590151
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Filing Dt:
|
11/03/2009
|
|
Publication #:
|
|
Pub Dt:
|
03/04/2010
| | | | |
|
Title:
|
BROAD BAND REFERENCING REFLECTOMETER
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|
|
Patent #:
|
|
Issue Dt:
|
05/24/2011
|
Application #:
|
12592641
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Filing Dt:
|
11/30/2009
|
|
Publication #:
|
|
Pub Dt:
|
07/08/2010
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR USING MULTIPLE RELATIVE REFLECTANCE MEASUREMENTS TO DETERMINE PROPERTIES OF A SAMPLE USING VACUUM ULTRA VIOLET WAVELENGTHS
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Patent #:
|
|
Issue Dt:
|
08/02/2011
|
Application #:
|
12592773
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Filing Dt:
|
12/02/2009
|
|
Publication #:
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|
Pub Dt:
|
07/15/2010
| | | | |
|
Title:
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METHOD AND APPARATUS FOR OPTICALLY MEASURING PERIODIC STRUCTURES USING ORTHOGONAL AZIMUTHAL SAMPLE ORIENTATION
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Patent #:
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Issue Dt:
|
08/14/2012
|
Application #:
|
12683436
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Filing Dt:
|
01/07/2010
|
|
Publication #:
|
|
Pub Dt:
|
07/07/2011
| | | | |
|
Title:
|
HIGH-RESOLUTION X-RAY DIFFRACTION MEASUREMENT WITH ENHANCED SENSITIVITY
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Patent #:
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Issue Dt:
|
10/22/2013
|
Application #:
|
12844851
|
Filing Dt:
|
07/28/2010
|
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Publication #:
|
|
Pub Dt:
|
11/18/2010
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR USING REFLECTOMETRY BELOW DEEP ULTRA-VIOLET (DUV) WAVELENGTHS FOR MEASURING PROPERTIES OF DIFFRACTING OR SCATTERING STRUCTURES ON SUBSTRATE WORK PIECES
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Patent #:
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Issue Dt:
|
02/21/2012
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Application #:
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12854917
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Filing Dt:
|
08/12/2010
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Publication #:
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Pub Dt:
|
12/02/2010
| | | | |
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Title:
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METHOD AND APPARATUS FOR ACCURATE CALIBRATION OF VUV REFLECTOMETER
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Patent #:
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Issue Dt:
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11/08/2011
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Application #:
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12876242
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Filing Dt:
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09/07/2010
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Publication #:
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Pub Dt:
|
12/30/2010
| | | | |
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Title:
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BROAD BAND REFERENCING REFLECTOMETER
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Patent #:
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Issue Dt:
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05/07/2013
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Application #:
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12958420
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Filing Dt:
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12/02/2010
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Publication #:
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Pub Dt:
|
06/07/2012
| | | | |
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Title:
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FAST MEASUREMENT OF X-RAY DIFFRACTION FROM TILTED LAYERS
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Patent #:
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Issue Dt:
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04/01/2014
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Application #:
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13180568
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Filing Dt:
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07/12/2011
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Publication #:
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Pub Dt:
|
01/19/2012
| | | | |
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Title:
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ENHANCING ACCURACY OF FAST HIGH-RESOLUTION X-RAY DIFFRACTOMETRY
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Patent #:
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Issue Dt:
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10/21/2014
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Application #:
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13350780
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Filing Dt:
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01/15/2012
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Publication #:
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Pub Dt:
|
07/19/2012
| | | | |
|
Title:
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Optical Vacuum Ultra-Violet Wavelength Nanoimprint Metrology
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Patent #:
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Issue Dt:
|
10/22/2013
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Application #:
|
13419497
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Filing Dt:
|
03/14/2012
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Publication #:
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Pub Dt:
|
11/01/2012
| | | | |
|
Title:
|
COMBINING X-RAY AND VUV ANALYSIS OF THIN FILM LAYERS
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Patent #:
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|
Issue Dt:
|
05/20/2014
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Application #:
|
13547073
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Filing Dt:
|
07/12/2012
|
|
Publication #:
|
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Pub Dt:
|
11/08/2012
| | | | |
|
Title:
|
HIGH-RESOLUTION X-RAY DIFFRACTION MEASUREMENT WITH ENHANCED SENSITIVITY
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Patent #:
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|
Issue Dt:
|
07/15/2014
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Application #:
|
13570271
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Filing Dt:
|
08/09/2012
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|
Publication #:
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Pub Dt:
|
02/14/2013
| | | | |
|
Title:
|
DETECTION OF WAFER-EDGE DEFECTS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
02/23/2016
|
Application #:
|
13872196
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Filing Dt:
|
04/29/2013
|
|
Publication #:
|
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Pub Dt:
|
10/31/2013
| | | | |
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Title:
|
X-RAY BEAM CONDITIONING
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/08/2014
|
Application #:
|
13913444
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Filing Dt:
|
06/09/2013
|
|
Publication #:
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Pub Dt:
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10/17/2013
| | | | |
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Title:
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X-RAY DETECTOR ASSEMBLY WITH SHIELD
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