Patent Assignment Details
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Reel/Frame: | 017651/0571 | |
| Pages: | 3 |
| | Recorded: | 03/15/2006 | | |
Attorney Dkt #: | 061887-0128 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/05/2011
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Application #:
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11348471
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Filing Dt:
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02/07/2006
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Publication #:
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Pub Dt:
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09/28/2006
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Title:
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ATOMIC LAYER DEPOSITION APPARATUS USING NEUTRAL BEAM AND METHOD OF DEPOSITING ATOMIC LAYER USING THE SAME
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Assignee
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SUNGKYUNKWAN UNIVERSITY, 300, CHEONCHEON-DONG, JANGAN-GU, SUWON-SI |
GYEONGGI-DO 440-746, KOREA, REPUBLIC OF |
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Correspondence name and address
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WILLIAM T. ELLIS
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FOLEY & LARDNER LLP
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WASHINGTON HARBOUR
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3000 K STREET, N.W., SUITE 500
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WASHINGTON, D.C. 20007-5143
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