Patent Assignment Details
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| Reel/Frame: | 011635/0575 | |
| Pages: | 4 |
| | Recorded: | 03/16/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09810805
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Filing Dt:
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03/16/2001
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Publication #:
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Pub Dt:
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09/19/2002
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Title:
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System and method for performing sputter deposition using a devergent ion beam source and a rotating substrate
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Assignee
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| 828 NORTH HENRY STREET |
| ALEXANDRIA, VIRGINIA 22314 |
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Correspondence name and address
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DANIEL H. GOLUB
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1701 MARKET STREET
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PHILADELPHIA, PA 19103
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Domestic representative
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DANIEL H. GOLUB
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1701 MARKET STREET
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PHILADELPHIA, PA 19103
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