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Patent Assignment Details
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Reel/Frame:012588/0576   Pages: 6
Recorded: 02/04/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
09/24/2002
Application #:
09624478
Filing Dt:
07/24/2000
Title:
FLUID DISTRIBUTION SYSTEM AND PROCESS, AND SEMICONDUCTOR FABRICATION FACILITY UTILIZING SAME
Assignors
1
Exec Dt:
12/18/2000
2
Exec Dt:
12/18/2000
3
Exec Dt:
12/29/2000
Assignee
1
7 COMMERCE DRIVE
DANBURY, CONNECTICUT 06810
Correspondence name and address
ADVANCED TECHNOLOGY MATERIALS, INC.
OLIVER A. ZITZMANN
7 COMMERCE DRIVE
DANBURY, CONNECTICUT 06810

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