Patent Assignment Details
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| Reel/Frame: | 012588/0576 | |
| Pages: | 6 |
| | Recorded: | 02/04/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09624478
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Filing Dt:
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07/24/2000
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Title:
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FLUID DISTRIBUTION SYSTEM AND PROCESS, AND SEMICONDUCTOR FABRICATION FACILITY UTILIZING SAME
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Assignee
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| 7 COMMERCE DRIVE |
| DANBURY, CONNECTICUT 06810 |
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Correspondence name and address
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ADVANCED TECHNOLOGY MATERIALS, INC.
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OLIVER A. ZITZMANN
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7 COMMERCE DRIVE
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DANBURY, CONNECTICUT 06810
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