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Patent Assignment Details

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Reel/Frame:	024849/0577			Pages:	6
		Recorded:	08/17/2010
Attorney Dkt #:	010274 APPS 1-10 CRCT ASG
Conveyance:	CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAME PREVIOUSLY RECORDED ON REEL 024834 FRAME 0937. ASSIGNOR(S) HEREBY CONFIRMS THE ADVANCED THERMAL SCIENCES CORPORATION.

Total properties: 10

Patent #:	8157951	Issue Dt:	04/17/2012	Application #:	11408333	Filing Dt:	04/21/2006
Publication #:	US20070081294	Pub Dt:	04/12/2007
Title:	CAPACITIVELY COUPLED PLASMA REACTOR HAVING VERY AGILE WAFER TEMPERATURE CONTROL

Patent #:	8021521	Issue Dt:	09/20/2011	Application #:	11408558	Filing Dt:	04/21/2006
Publication #:	US20070091537	Pub Dt:	04/26/2007
Title:	METHOD FOR AGILE WORKPIECE TEMPERATURE CONTROL IN A PLASMA REACTOR USING A THERMAL MODEL

Patent #:	8012304	Issue Dt:	09/06/2011	Application #:	11408559	Filing Dt:	04/21/2006
Publication #:	US20070089834	Pub Dt:	04/26/2007
Title:	PLASMA REACTOR WITH A MULTIPLE ZONE THERMAL CONTROL FEED FORWARD CONTROL APPARATUS

Patent #:	8221580	Issue Dt:	07/17/2012	Application #:	11408567	Filing Dt:	04/21/2006
Publication #:	US20070091538	Pub Dt:	04/26/2007
Title:	PLASMA REACTOR WITH WAFER BACKSIDE THERMAL LOOP, TWO-PHASE INTERNAL PEDESTAL THERMAL LOOP AND A CONTROL PROCESSOR GOVERNING BOTH LOOPS

Patent #:	8608900	Issue Dt:	12/17/2013	Application #:	11409183	Filing Dt:	04/21/2006
Publication #:	US20070091539	Pub Dt:	04/26/2007
Title:	PLASMA REACTOR WITH FEED FORWARD THERMAL CONTROL SYSTEM USING A THERMAL MODEL FOR ACCOMMODATING RF POWER CHANGES OR WAFER TEMPERATURE CHANGES

Patent #:	NONE	Issue Dt:		Application #:	11409184	Filing Dt:	04/21/2006
Publication #:	US20070091540	Pub Dt:	04/26/2007
Title:	METHOD OF PROCESSING A WORKPIECE IN A PLASMA REACTOR USING MULTIPLE ZONE FEED FORWARD THERMAL CONTROL

Patent #:	8092638	Issue Dt:	01/10/2012	Application #:	11409292	Filing Dt:	04/21/2006
Publication #:	US20070081295	Pub Dt:	04/12/2007
Title:	CAPACITIVELY COUPLED PLASMA REACTOR HAVING A COOLED/HEATED WAFER SUPPORT WITH UNIFORM TEMPERATURE DISTRIBUTION

Patent #:	NONE	Issue Dt:		Application #:	11409326	Filing Dt:	04/21/2006
Publication #:	US20070091541	Pub Dt:	04/26/2007
Title:	METHOD OF PROCESSING A WORKPIECE IN A PLASMA REACTOR USING FEED FORWARD THERMAL CONTROL

Patent #:	8034180	Issue Dt:	10/11/2011	Application #:	11410782	Filing Dt:	04/24/2006
Publication #:	US20070097580	Pub Dt:	05/03/2007
Title:	METHOD OF COOLING A WAFER SUPPORT AT A UNIFORM TEMPERATURE IN A CAPACITIVELY COUPLED PLASMA REACTOR

Patent #:	7988872	Issue Dt:	08/02/2011	Application #:	11410859	Filing Dt:	04/24/2006
Publication #:	US20070081296	Pub Dt:	04/12/2007
Title:	METHOD OF OPERATING A CAPACITIVELY COUPLED PLASMA REACTOR WITH DUAL TEMPERATURE CONTROL LOOPS

Assignor

Exec Dt:

08/13/2010

Assignee

3355 EAST LA PALMA AVENUE

ANAHEIM, CALIFORNIA 92806

Correspondence name and address
	LAW OFFICE OF ROBERT M. WALLACE
	2112 EASTMAN AVENUE, SUITE 102
	VENTURA, CA 93003

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