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Total properties:
16
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Patent #:
|
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Issue Dt:
|
03/01/2016
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Application #:
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13422471
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Filing Dt:
|
03/16/2012
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Publication #:
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Pub Dt:
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09/20/2012
| | | | |
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Title:
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METHOD FOR PROCESSING AN EMBEDDED METAL FILM
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Patent #:
|
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Issue Dt:
|
10/17/2017
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Application #:
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14511773
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Filing Dt:
|
10/10/2014
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Publication #:
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Pub Dt:
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01/29/2015
| | | | |
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Title:
|
LIGHTWEIGHT CARRIER STRUCTURE, PARTICULARLY FOR OPTICAL COMPONENTS, AND METHOD FOR ITS PRODUCTION
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|
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Patent #:
|
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Issue Dt:
|
11/29/2016
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Application #:
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14547318
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Filing Dt:
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11/19/2014
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Publication #:
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Pub Dt:
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05/21/2015
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Title:
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SOLID BODY JOINING OF A CARRIER BODY AND A COVER LAYER, PARTICULARLY BY ANODIC BONDING
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Patent #:
|
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Issue Dt:
|
06/06/2017
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Application #:
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14723608
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Filing Dt:
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05/28/2015
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Publication #:
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Pub Dt:
|
12/03/2015
| | | | |
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Title:
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CLAMP WITH CERAMIC ELECTRODE
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Patent #:
|
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Issue Dt:
|
01/03/2017
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Application #:
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14723635
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Filing Dt:
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05/28/2015
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Publication #:
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Pub Dt:
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12/03/2015
| | | | |
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Title:
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CLAMP WITH BURLS-ELECTRODE
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|
|
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Patent #:
|
|
Issue Dt:
|
06/06/2017
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Application #:
|
14724083
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Filing Dt:
|
05/28/2015
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Publication #:
|
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Pub Dt:
|
12/03/2015
| | | | |
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Title:
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CLAMP WITH ELECTRODE CARRIER DISK
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|
|
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Patent #:
|
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Issue Dt:
|
08/08/2017
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Application #:
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14724215
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Filing Dt:
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05/28/2015
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Publication #:
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Pub Dt:
|
12/03/2015
| | | | |
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Title:
|
METHOD FOR PRODUCING AN ELECTROSTATIC HOLDING APPARATUS
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|
|
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Patent #:
|
|
Issue Dt:
|
04/27/2021
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Application #:
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15164435
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Filing Dt:
|
05/25/2016
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Publication #:
|
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Pub Dt:
|
12/08/2016
| | | | |
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Title:
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METHOD OF MANUFACTURING A HOLDING PLATE, IN PARTICULAR FOR A CLAMP FOR HOLDING WAFERS
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|
|
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Patent #:
|
|
Issue Dt:
|
04/09/2019
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Application #:
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15365365
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Filing Dt:
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11/30/2016
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Publication #:
|
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Pub Dt:
|
06/08/2017
| | | | |
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Title:
|
ELECTROSTATIC HOLDING DEVICE AND METHOD FOR THE OPERATION THEREOF, AND CHARGE TRANSFER CIRCUIT
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|
|
|
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Patent #:
|
|
Issue Dt:
|
08/20/2019
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Application #:
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15430427
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Filing Dt:
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02/10/2017
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Publication #:
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Pub Dt:
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08/17/2017
| | | | |
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Title:
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DETECTION CIRCUIT, ELECTROSTATIC HOLDING DEVICE AND METHOD FOR DETECTING A COMPONENT ON AN ELECTROSTATIC HOLDING DEVICE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
11/12/2019
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Application #:
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15873454
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Filing Dt:
|
01/17/2018
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|
Publication #:
|
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Pub Dt:
|
07/26/2018
| | | | |
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Title:
|
METHOD FOR PROCESSING A HOLDING PLATE, IN PARTICULAR FOR A CLAMP FOR HOLDING A WAFER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
07/26/2022
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Application #:
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16504227
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Filing Dt:
|
07/06/2019
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|
Publication #:
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Pub Dt:
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01/09/2020
| | | | |
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Title:
|
ELECTROSTATIC HOLDING APPARATUS AND METHOD FOR ITS PRODUCTION
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|
|
|
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Patent #:
|
|
Issue Dt:
|
12/14/2021
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Application #:
|
16750517
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Filing Dt:
|
01/23/2020
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Publication #:
|
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Pub Dt:
|
07/23/2020
| | | | |
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Title:
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HOLDING APPARATUS FOR ELECTROSTATICALLY HOLDING A COMPONENT, INCLUDING A BASE BODY JOINED BY DIFFUSION BONDING, AND PROCESS FOR ITS MANUFACTURE
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|
|
|
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Patent #:
|
NONE
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Issue Dt:
|
11/22/2022
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Application #:
|
16834597
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Filing Dt:
|
03/30/2020
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|
Publication #:
|
|
Pub Dt:
|
10/08/2020
| | | | |
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Title:
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ELECTROSTATIC HOLDING APPARATUS WITH A LAYERED COMPOSITE ELECTRODE DEVICE AND METHOD FOR THE PRODUCTION THEREOF
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|
|
|
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Patent #:
|
|
Issue Dt:
|
08/02/2022
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Application #:
|
17170729
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Filing Dt:
|
02/08/2021
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|
Publication #:
|
|
Pub Dt:
|
08/26/2021
| | | | |
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Title:
|
METHOD FOR PRODUCTION OF A COMPONENT BY ATOMIC DIFFUSION BONDING
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|
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
17173651
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Filing Dt:
|
02/11/2021
|
|
Publication #:
|
|
Pub Dt:
|
08/19/2021
| | | | |
|
Title:
|
METHOD AND POLISHING APPARATUS FOR MACHINING A PLATE-SHAPED COMPONENT, AND PLATE-SHAPED COMPONENT, IN PARTICULAR ELECTROSTATIC HOLDING APPARATUS OR IMMERSION WAFER PANEL
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