Patent Assignment Details
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Reel/Frame: | 009248/0582 | |
| Pages: | 5 |
| | Recorded: | 03/26/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/09/2000
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Application #:
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09048848
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Filing Dt:
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03/26/1998
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Title:
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HIGHLY SELECTIVE CHEMICAL DRY ETCHING OF SILICON NITRIDE OVER SILICON AND SILICON DIOXIDE
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Assignee
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P.O. BOX 9 |
ALBANY, NEW YORK 12201 |
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Correspondence name and address
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HESLIN & ROTHENBERG
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KEVIN P. RADIGAN
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5 COLUMBIA CIRCLE
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ALBANY, NY 12203
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