Patent Assignment Details
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Reel/Frame: | 027744/0583 | |
| Pages: | 3 |
| | Recorded: | 02/22/2012 | | |
Attorney Dkt #: | Q119590 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13274006
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Filing Dt:
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10/14/2011
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Publication #:
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Pub Dt:
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05/31/2012
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Title:
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MIRROR FOR EUV WAVELENGTHS, PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY HAVING SUCH MIRROR AND PROJECTION EXPOSURE APPARATUS HAVING SUCH PROJECTION OBJECTIVE
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Assignee
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POSTFACH 10 01 54 |
MANNHEIM, GERMANY 68001 |
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Correspondence name and address
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GEORGE F. LEHNIGK
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2100 PENNSYLVANIA AVE NW
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SUITE 800
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WASHINGTON, DC 20037
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