Patent Assignment Details
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Reel/Frame: | 024368/0587 | |
| Pages: | 4 |
| | Recorded: | 05/11/2010 | | |
Attorney Dkt #: | 499995 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/03/2012
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Application #:
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12725141
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Filing Dt:
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03/16/2010
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Publication #:
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Pub Dt:
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08/26/2010
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Title:
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SYSTEM AND METHOD FOR A SEMICONDUCTOR LITHOGRAPHIC PROCESS CONTROL USING STATISTICAL INFORMATION IN DEFECT IDENTIFICATION
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Assignee
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7F NK SHIMURASAKAUE BLDG |
3-6-7 AZUSAWA, ITABASHI-KU |
TOKYO, JAPAN 174-0051 |
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Correspondence name and address
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LATHROP & GAGE LLP
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4845 PEARL EAST CIRCLE
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SUITE 201
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BOULDER, CO 80301
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