Total properties:
35
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Patent #:
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Issue Dt:
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09/15/1987
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Application #:
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06308647
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Filing Dt:
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10/05/1981
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Title:
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METHOD AND APPARATUS FOR OPTICAL SYSTEM ADJUSTMENTS
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Patent #:
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Issue Dt:
|
07/23/1985
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Application #:
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06504718
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Filing Dt:
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06/15/1983
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Title:
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WAFER TRANSFERRING CHUCK ASSEMBLY
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Patent #:
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Issue Dt:
|
08/19/1986
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Application #:
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06505592
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Filing Dt:
|
06/20/1983
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Title:
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FINE ALIGNMENT SYSTEM
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Patent #:
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Issue Dt:
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04/01/1986
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Application #:
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06621839
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Filing Dt:
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06/18/1984
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Title:
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HIGH VOLTAGE OPERATIONAL AMPLIFIER
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Patent #:
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Issue Dt:
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12/08/1987
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Application #:
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06732764
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Filing Dt:
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05/10/1985
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Title:
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RING FIELD PROJECTION SYSTEM
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Patent #:
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Issue Dt:
|
05/06/1986
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Application #:
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06780786
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Filing Dt:
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09/27/1985
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Title:
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LENS ASSEMBLY
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Patent #:
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Issue Dt:
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05/26/1987
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Application #:
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06790673
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Filing Dt:
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10/23/1985
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Title:
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OPTICAL FIGURING BY PLASMA ASSISTED CHEMICAL TRANSPORT AND ETCHING APPARATUS THEREFOR
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Patent #:
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Issue Dt:
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03/29/1988
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Application #:
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06796339
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Filing Dt:
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11/12/1985
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Title:
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SHORT ARC LAMP IMAGE TRANSFORMER
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Patent #:
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Issue Dt:
|
03/06/1990
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Application #:
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06842145
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Filing Dt:
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03/21/1986
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Title:
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UNIVERSAL EDGED-BASED WAFER ALIGNMENT APPARATUS
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Patent #:
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Issue Dt:
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07/21/1987
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Application #:
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06856881
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Filing Dt:
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04/28/1986
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Title:
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ADJUSTABLE MOUNT FOR LARGE MIRRORS
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Patent #:
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Issue Dt:
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09/29/1987
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Application #:
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06868506
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Filing Dt:
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07/31/1986
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Title:
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REVERSE DARK FIELD ALIGNMENT SYSTEM FOR SCANNING LITHOGRAPHIC ALIGNER
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Patent #:
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Issue Dt:
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02/23/1988
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Application #:
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06876068
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Filing Dt:
|
06/19/1986
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Title:
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HIGH RESONANCE ADJUSTABLE MIRROR MOUNT
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Patent #:
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Issue Dt:
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01/19/1988
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Application #:
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06877817
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Filing Dt:
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06/24/1986
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Title:
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RETICLE TRANSPORTER
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Patent #:
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Issue Dt:
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07/26/1988
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Application #:
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06927202
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Filing Dt:
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11/05/1986
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Title:
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HIGH SPEED RETICLE CHANGE SYSTEM
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Patent #:
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Issue Dt:
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07/11/1989
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Application #:
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07012538
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Filing Dt:
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02/09/1987
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Title:
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WAFER HANDLING SYSTEM
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Patent #:
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|
Issue Dt:
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08/28/1990
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Application #:
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07198545
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Filing Dt:
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05/18/1988
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Title:
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MICROLITHOGRAPHIC APPARATUS
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Patent #:
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|
Issue Dt:
|
09/04/1990
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Application #:
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07223968
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Filing Dt:
|
07/15/1988
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Title:
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OPTICAL REDUCTION SYSTEM
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|
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Patent #:
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|
Issue Dt:
|
09/04/1990
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Application #:
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07301088
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Filing Dt:
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01/25/1989
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Title:
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AIR GAUGE SENSOR
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Patent #:
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|
Issue Dt:
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11/27/1990
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Application #:
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07351741
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Filing Dt:
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04/17/1989
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Title:
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WAFER HANDLING SYSTEM
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|
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Patent #:
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|
Issue Dt:
|
02/04/1992
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Application #:
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07577209
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Filing Dt:
|
09/04/1990
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Title:
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WAFER HANDLING SYSTEM
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|
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Patent #:
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|
Issue Dt:
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03/16/1993
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Application #:
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07790427
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Filing Dt:
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11/12/1991
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Title:
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WAFER HANDLING SYSTEM
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|
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Patent #:
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|
Issue Dt:
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05/18/1993
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Application #:
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07831818
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Filing Dt:
|
02/06/1992
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Title:
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BROAD BAND OPTICAL REDUCTION SYSTEM USING MATCHED MULTIPLE REFRACTIVE ELEMENT MATERIALS
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|
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Patent #:
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|
Issue Dt:
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12/19/1995
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Application #:
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08292096
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Filing Dt:
|
08/17/1994
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Title:
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OFF AXIS ALIGNMENT SYSTEM FOR SCANNING PHOTOLITHOGRAPHY
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|
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Patent #:
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|
Issue Dt:
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03/03/1998
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Application #:
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08448994
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Filing Dt:
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05/24/1995
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Title:
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ILLUMINATION SYSTEM HAVING SPATIALLY SEPARATE VERTICAL AND HORIZONTAL IMAGE PLANES FOR USE IN PHOTOLITHOGRAPHY
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|
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Patent #:
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|
Issue Dt:
|
07/06/1999
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Application #:
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08730787
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Filing Dt:
|
10/16/1996
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Title:
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LINE WIDTH INSENSITIVE WAFER TARGET DETECTION
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|
|
Patent #:
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|
Issue Dt:
|
05/26/1998
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Application #:
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08785764
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Filing Dt:
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12/23/1996
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Title:
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MOVING INTERFEROMETER WAFER STAGE
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Patent #:
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Issue Dt:
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10/06/1998
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Application #:
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08835845
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Filing Dt:
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04/30/1997
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Title:
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LAMP STABLITY DIAGNOSTIC SYSTEM
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|
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Patent #:
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|
Issue Dt:
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10/26/1999
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Application #:
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08878633
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Filing Dt:
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06/19/1997
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Title:
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VACUUM ASSISTED DEBRIS REMOVAL SYSTEM
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|
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Patent #:
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|
Issue Dt:
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02/27/2001
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Application #:
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09238976
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Filing Dt:
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01/27/1999
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Title:
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REFLECTIVE FLY'S EYE CONDENSER FOR EUV LITHOGRAPHY
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|
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Patent #:
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|
Issue Dt:
|
10/12/1999
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Application #:
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09290217
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Filing Dt:
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04/13/1999
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Title:
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LINE WIDTH INSENTIVE WAFER TARGET DETECTION IN TWO DIRECTIONS
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|
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Patent #:
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|
Issue Dt:
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03/19/2002
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Application #:
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09344664
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Filing Dt:
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06/25/1999
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Title:
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IN SITU PROJECTION OPTIC METROLOGY METHOD AND APPARATUS
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|
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Patent #:
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|
Issue Dt:
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10/22/2002
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Application #:
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09371337
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Filing Dt:
|
08/10/1999
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Title:
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MULTI-CHANNEL GRATING INTERFERENCE ALIGNMENT SENSOR
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|
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Patent #:
|
|
Issue Dt:
|
09/03/2002
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Application #:
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09473259
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Filing Dt:
|
12/27/1999
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Title:
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EUV RETICLE THERMAL MANAGEMENT
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|
|
Patent #:
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|
Issue Dt:
|
11/26/2002
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Application #:
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09620886
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Filing Dt:
|
07/21/2000
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Title:
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HIGH NUMERICAL APERTURE CATADIOPTRIC LENS
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|
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Patent #:
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|
Issue Dt:
|
06/03/2003
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Application #:
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09826214
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Filing Dt:
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04/04/2001
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Publication #:
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Pub Dt:
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10/10/2002
| | | | |
Title:
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DUV SCANNER LINEWIDTH CONTROL BY MASK ERROR FACTOR COMPENSATION
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