Patent Assignment Details
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Reel/Frame: | 014348/0589 | |
| Pages: | 3 |
| | Recorded: | 07/29/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/27/2005
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Application #:
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10628914
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Filing Dt:
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07/29/2003
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Publication #:
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Pub Dt:
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02/03/2005
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Title:
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CD SEM AUTOMATIC FOCUS METHODOLOGY AND APPARATUS FOR CONSTANT ELECTRON BEAM DOSAGE CONTROL
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Assignee
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121 PARK AVE. 3 |
SCIENCE-BASED INDUSTRIAL PARK |
HSIN-CHU, TAIWAN R.O.C. |
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Correspondence name and address
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GEORGE O. SAILE
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28 DAVIS AVENUE
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POUGHKEEPSIE, NEW YORK 12603
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