Patent Assignment Details
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Reel/Frame: | 013659/0590 | |
| Pages: | 6 |
| | Recorded: | 01/14/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/29/2007
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Application #:
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10285015
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Filing Dt:
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10/31/2002
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Publication #:
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Pub Dt:
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05/06/2004
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Title:
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SUPERCRITICAL CARBON DIOXIDE/CHEMICAL FORMULATION FOR ASHED AND UNASHED ALUMINUM POST-ETCH RESIDUE REMOVAL
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Assignee
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7 COMMERCE DRIVE |
DANBURY, CONNECTICUT 06810 |
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Correspondence name and address
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ADVANCED TECHNOLOGY MATERIALS, INC.
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OLIVER A. ZITZMANN
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7 COMMERCE DRIVE
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DANBURY, CT 06810
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