Patent Assignment Details
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Reel/Frame: | 016426/0593 | |
| Pages: | 4 |
| | Recorded: | 06/28/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11020376
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Filing Dt:
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12/22/2004
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Publication #:
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Pub Dt:
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05/19/2005
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Title:
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Stabilization of electronegative plasmas with feedback control of RF generator systems
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Assignee
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90 INDUSTRIAL WAY |
WILMINGTON, MASSACHUSETTS 01887 |
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Correspondence name and address
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PATENT ADMINISTRATOR
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PROSKAUER ROSE LLP
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ONE INTERNATONAL PLACE
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14TH FLOOR
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BOSTON, MA 02110-2600
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