Patent Assignment Details
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Reel/Frame: | 008581/0596 | |
| Pages: | 2 |
| | Recorded: | 03/20/1997 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/19/1999
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Application #:
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08822588
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Filing Dt:
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03/20/1997
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Title:
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METHODS AND APPARATUS FOR CONTROLLED PARTIAL ASHING IN A VARIABLE-GAP PLASMA PROCESSING CHAMBER
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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HICKMAN BEYER & WEAVER
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JOSEPH A. NGUYEN
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P.O. BOX 61059
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PALO ALTO, CA 94306
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