skip navigationU S P T O SealUnited States Patent and Trademark Office AOTW logo
Home|Site Index|Search|Guides|Contacts|eBusiness|eBiz alerts|News|Help
Assignments on the Web > Patent Query
Patent Assignment Details
NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:020417/0596   Pages: 7
Recorded: 01/28/2008
Attorney Dkt #:KLA-000
Conveyance: MERGER (SEE DOCUMENT FOR DETAILS).
Total properties: 28
1
Patent #:
5444637
Issue Dt:
08/22/1995
Application #:
08127941
Filing Dt:
09/28/1993
Title:
PROGRAMMABLE SEMICONDUCTOR WAFER FOR SENSING, RECORDING AND RETRIEVING FABRICATION PROCESS CONDITIONS TO WHICH THE WAFER IS EXPOSED
2
Patent #:
6542835
Issue Dt:
04/01/2003
Application #:
09816648
Filing Dt:
03/22/2001
Publication #:
US20020165678
Pub Dt:
11/07/2002
Title:
DATA COLLECTION METHODS AND APPARATUS
3
Patent #:
6789034
Issue Dt:
09/07/2004
Application #:
10126429
Filing Dt:
04/19/2002
Publication #:
US20020193957
Pub Dt:
12/19/2002
Title:
DATA COLLECTION METHODS AND APPARATUS WITH PARASITIC CORRECTION
4
Patent #:
6971036
Issue Dt:
11/29/2005
Application #:
10126455
Filing Dt:
04/19/2002
Publication #:
US20020172097
Pub Dt:
11/21/2002
Title:
METHODS AND APPARATUS FOR LOW POWER DELAY CONTROL
5
Patent #:
6741945
Issue Dt:
05/25/2004
Application #:
10126456
Filing Dt:
04/19/2002
Publication #:
US20020177916
Pub Dt:
11/28/2002
Title:
SENSOR GEOMETRY CORRECTION METHODS AND APPARATUS
6
Patent #:
6738722
Issue Dt:
05/18/2004
Application #:
10126457
Filing Dt:
04/19/2002
Publication #:
US20020177917
Pub Dt:
11/28/2002
Title:
DATA COLLECTION AND CORRECTION METHODS AND APPARATUS
7
Patent #:
6671660
Issue Dt:
12/30/2003
Application #:
10126497
Filing Dt:
04/19/2002
Publication #:
US20020161557
Pub Dt:
10/31/2002
Title:
METHODS AND APPARATUS FOR POWER CONTROL
8
Patent #:
6830650
Issue Dt:
12/14/2004
Application #:
10194526
Filing Dt:
07/12/2002
Publication #:
US20040007326
Pub Dt:
01/15/2004
Title:
WAFER PROBE FOR MEASURING PLASMA AND SURFACE CHARACTERISTICS IN PLASMA PROCESSING ENVIROMENTS
9
Patent #:
6902646
Issue Dt:
06/07/2005
Application #:
10640892
Filing Dt:
08/14/2003
Publication #:
US20050034811
Pub Dt:
02/17/2005
Title:
SENSOR ARRAY FOR MEASURING PLASMA CHARACTERISTICS IN PLASMA PROCESSING ENVIRONMENTS
10
Patent #:
6907364
Issue Dt:
06/14/2005
Application #:
10664810
Filing Dt:
09/16/2003
Publication #:
US20040107066
Pub Dt:
06/03/2004
Title:
METHODS AND APPARATUS FOR DERIVING THERMAL FLUX DATA FOR PROCESSING A WORKPIECE
11
Patent #:
7212950
Issue Dt:
05/01/2007
Application #:
10666932
Filing Dt:
09/17/2003
Publication #:
US20040131226
Pub Dt:
07/08/2004
Title:
METHODS AND APPARATUS FOR EQUIPMENT MATCHING AND CHARACTERIZATION
12
Patent #:
7016754
Issue Dt:
03/21/2006
Application #:
10673049
Filing Dt:
09/26/2003
Publication #:
US20040249604
Pub Dt:
12/09/2004
Title:
METHODS OF AND APPARATUS FOR CONTROLLING PROCESS PROFILES
13
Patent #:
7127362
Issue Dt:
10/24/2006
Application #:
10775044
Filing Dt:
02/09/2004
Publication #:
US20040236524
Pub Dt:
11/25/2004
Title:
PROCESS TOLERANT METHODS AND APPARATUS FOR OBTAINING DATA
14
Patent #:
NONE
Issue Dt:
Application #:
10848523
Filing Dt:
05/17/2004
Publication #:
US20050028049
Pub Dt:
02/03/2005
Title:
Sensor methods and apparatus
15
Patent #:
NONE
Issue Dt:
Application #:
10875954
Filing Dt:
06/24/2004
Publication #:
US20050284570
Pub Dt:
12/29/2005
Title:
Diagnostic plasma measurement device having patterned sensors and features
16
Patent #:
7282889
Issue Dt:
10/16/2007
Application #:
10888526
Filing Dt:
07/10/2004
Publication #:
US20040267501
Pub Dt:
12/30/2004
Title:
MAINTENANCE UNIT FOR A SENSOR APPARATUS
17
Patent #:
NONE
Issue Dt:
Application #:
10920138
Filing Dt:
08/17/2004
Publication #:
US20050011611
Pub Dt:
01/20/2005
Title:
Wafer probe for measuring plasma and surface characteristics in plasma processing environments
18
Patent #:
NONE
Issue Dt:
Application #:
10933167
Filing Dt:
09/02/2004
Publication #:
US20060043063
Pub Dt:
03/02/2006
Title:
Electrically floating diagnostic plasma probe with ion property sensors
19
Patent #:
7192505
Issue Dt:
03/20/2007
Application #:
10951162
Filing Dt:
09/27/2004
Publication #:
US20050034812
Pub Dt:
02/17/2005
Title:
WAFER PROBE FOR MEASURING PLASMA AND SURFACE CHARACTERISTICS IN PLASMA PROCESSING ENVIRONMENTS
20
Patent #:
NONE
Issue Dt:
Application #:
11047256
Filing Dt:
01/31/2005
Publication #:
US20060171848
Pub Dt:
08/03/2006
Title:
Diagnostic plasma sensors for endpoint and end-of-life detection
21
Patent #:
8545669
Issue Dt:
10/01/2013
Application #:
11066520
Filing Dt:
02/25/2005
Publication #:
US20050151544
Pub Dt:
07/14/2005
Title:
SENSOR ARRAY FOR MEASURING PLASMA CHARACTERISTICS IN PLASMA PROCESSING ENVIRONMENTS
22
Patent #:
7299148
Issue Dt:
11/20/2007
Application #:
11177922
Filing Dt:
07/08/2005
Publication #:
US20060052969
Pub Dt:
03/09/2006
Title:
METHODS AND APPARATUS FOR LOW DISTORTION PARAMETER MEASUREMENTS
23
Patent #:
7580767
Issue Dt:
08/25/2009
Application #:
11179440
Filing Dt:
07/11/2005
Publication #:
US20070055403
Pub Dt:
03/08/2007
Title:
METHODS OF AND APPARATUSES FOR MAINTENANCE, DIAGNOSIS, AND OPTIMIZATION OF PROCESSES
24
Patent #:
7403834
Issue Dt:
07/22/2008
Application #:
11228004
Filing Dt:
09/14/2005
Publication #:
US20060089740
Pub Dt:
04/27/2006
Title:
METHODS OF AND APPARATUSES FOR CONTROLLING PROCESS PROFILES
25
Patent #:
7960670
Issue Dt:
06/14/2011
Application #:
11281238
Filing Dt:
11/16/2005
Publication #:
US20060249729
Pub Dt:
11/09/2006
Title:
METHODS OF AND APPARATUSES FOR MEASURING ELECTRICAL PARAMETERS OF A PLASMA PROCESS
26
Patent #:
7531984
Issue Dt:
05/12/2009
Application #:
11366303
Filing Dt:
03/01/2006
Publication #:
US20060181242
Pub Dt:
08/17/2006
Title:
SENSOR APPARATUS POWER TRANSFER, COMMUNICATION AND MAINTENANCE METHODS AND APPARATUS
27
Patent #:
7722434
Issue Dt:
05/25/2010
Application #:
11392220
Filing Dt:
03/28/2006
Publication #:
US20070243794
Pub Dt:
10/18/2007
Title:
APPARATUS FOR MEASUREMENT OF PARAMETERS IN PROCESS EQUIPMENT
28
Patent #:
7482576
Issue Dt:
01/27/2009
Application #:
11430315
Filing Dt:
05/03/2006
Publication #:
US20060289763
Pub Dt:
12/28/2006
Title:
APPARATUSES FOR AND METHODS OF MONITORING OPTICAL RADIATION PARAMETERS FOR SUBSTRATE PROCESSING OPERATIONS
Assignor
1
ONWAFER TECHNOLOGIES INC.
Exec Dt:
01/16/2007
Assignee
1
KLA-TENCOR CORPORATION
160 RIO ROBLES
SAN JOSE, CALIFORNIA 95134
Correspondence name and address
JOSHUA D. ISENBERG
809 CORPORATE WAY
FREMONT, CA 94539

Search Results as of: 09/21/2024 11:11 AM
If you have any comments or questions concerning the data displayed, contact PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified: August 25, 2017 v.2.6
| .HOME | INDEX| SEARCH | eBUSINESS | CONTACT US | PRIVACY STATEMENT