Patent Assignment Details
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Reel/Frame: | 029703/0596 | |
| Pages: | 4 |
| | Recorded: | 01/28/2013 | | |
Attorney Dkt #: | 3194.1062-009 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/14/2014
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Application #:
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13667516
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Filing Dt:
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11/02/2012
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Publication #:
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Pub Dt:
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05/16/2013
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Title:
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Electrostatic Chuck with Photo-Patternable Soft Protrusion Contact Surface
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Assignee
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129 CONCORD ROAD |
BILLERICA, MASSACHUSETTS 01821-4600 |
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Correspondence name and address
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ALICE O. CARROLL, ESQ.
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530 VIRGINIA ROAD, P.O. BOX 9133
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HAMILTON, BROOK, SMITH & REYNOLDS, P.C.
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CONCORD, MA 01742-9133
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